Dr. Andrei Sabac Profile

Dr. Andrei Sabac

at Univ de Franche-Comté

SPIE Involvement:

Author

Publications (13)

SPIE Journal Paper | 1 April 2006

Fabrication and optical packaging of an integrated Mach-Zehnder interferometer on top of a movable micromirror

Lukasz Nieradko, Christophe Gorecki, Michal Józwik, Andrei Sabac, Rolf Hoffmann, Andreas Bertz

JM3, Vol. 5, Issue 02, 023009, (April 2006) https://doi.org/10.1117/12.10.1117/1.2203366

KEYWORDS: Micromirrors, Waveguides, Silicon, Integrated optics, Semiconducting wafers, Mirrors, Photomasks, Sensors, Packaging, Etching

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Proceedings Article | 13 June 2005 Paper

Development and investigation of high resolution resonant pressure sensor with optical interrogation

Michal Jozwik, Christophe Gorecki, Andrei Sabac, Dominique Heinis, Thierry Dean, Alain Jacobelli

Proceedings Volume 5856, (2005) https://doi.org/10.1117/12.612605

KEYWORDS: Sensors, Waveguides, Transducers, Ferroelectric materials, Refractive index, Optical resolution, Microelectromechanical systems, Actuators, Protactinium, Silicon

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Proceedings Article | 22 January 2005 Paper

Active membrane in situ read-out by monolithic integration of silicon-based Mach-Zehnder interferometer

Christophe Gorecki, Lukasz Nieradko, Andrei Sabac, Michal Jozwik, Alain Jackobelli, Thierry Dean, Rolf Hoffman, Andreas Bertz

Proceedings Volume 5719, (2005) https://doi.org/10.1117/12.592237

KEYWORDS: Waveguides, Mirrors, Sensors, Silicon, Refractive index, Microelectromechanical systems, Integrated optics, Micromirrors, Transducers, Mach-Zehnder interferometers

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Proceedings Article | 17 August 2004 Paper

Design, testing, and calibration of an integrated Mach-Zehnder-based optical read-out architecture for MEMS characterization

Andrei Sabac, Christophe Gorecki, Michal Jozwik, Thierry Dean, Alain Jacobelli

Proceedings Volume 5458, (2004) https://doi.org/10.1117/12.546299

KEYWORDS: Waveguides, Geometrical optics, Microelectromechanical systems, Integrated optics, Ferroelectric materials, Silicon, Phase shifts, Calibration, Light wave propagation, Radio propagation

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Proceedings Article | 2 August 2004 Paper

Evaluation of the mechanical properties of square membranes prestressed by PECVD silicon oxynitride thin films

Michal Jozwik, Christophe Gorecki, Patrick Delobelle, Andrei Sabac, Malgorzata Kujawinska

Proceedings Volume 5532, (2004) https://doi.org/10.1117/12.569806

KEYWORDS: Silicon, Refractive index, Plasma enhanced chemical vapor deposition, Thin films, Silicon films, Interferometry, Semiconducting wafers, Oxides, Finite element methods, Thin film deposition

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Proceedings Article | 24 January 2004 Paper

Fabrication and optical packaging of an integrated Mach-Zehnder interferometer on top of a moveable micromirror

Lukasz Nieradko, Christophe Gorecki, Andrei Sabac, Rolf Hoffmann, Andreas Bertz

Proceedings Volume 5346, (2004) https://doi.org/10.1117/12.524726

KEYWORDS: Waveguides, Mirrors, Micromirrors, Silicon, Semiconducting wafers, Plasma enhanced chemical vapor deposition, Integrated optics, Microelectromechanical systems, Wafer-level optics, Mach-Zehnder interferometers

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Proceedings Article | 3 October 2003 Paper

Integrated optomechanical sensor for in situ characterization of MEMS: the implementing of a readout architecture

Christophe Gorecki, Andrei Sabac, P. Bey, K. Gut, Alain Jacobelli, Thierry Dean

Proceedings Volume 5145, (2003) https://doi.org/10.1117/12.501463

KEYWORDS: Waveguides, Sensors, Microelectromechanical systems, Ferroelectric materials, Integrated optics, Optical fibers, Transducers, Refractive index, Microsensors, Electrodes

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Proceedings Article | 22 September 2003 Paper

Interferometry system for out-of-plane displacements and microshape measurements of silicon membranes

Michal Jozwik, Andrei Sabac, Christophe Gorecki

Proceedings Volume 5124, (2003) https://doi.org/10.1117/12.517118

KEYWORDS: Silicon, Thin films, Refractive index, Plasma enhanced chemical vapor deposition, Interferometry, Silicon films, Thin film deposition, Integrated optics, Interferometers, Etching

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Proceedings Article | 15 April 2003 Paper

Micromachined fiber optic-to-Mach-Zehnder interferometer coupling via SiON channel waveguide

Lukasz Nieradko, Christophe Gorecki, Andrei Sabac, Jean Jeannot

Proceedings Volume 4943, (2003) https://doi.org/10.1117/12.468517

KEYWORDS: Chromium, Semiconducting wafers, Photomasks, Silicon, Optical lithography, Mach-Zehnder interferometers, Waveguides, Metals, Etching, Fiber optics

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Proceedings Article | 3 April 2003 Paper

Silicon oxynitride waveguides developed for optomechanical sensing functions

Andrei Sabac, Michal Jozwik, Lukasz Nieradko, Christophe Gorecki

Proceedings Volume 4944, (2003) https://doi.org/10.1117/12.468293

KEYWORDS: Waveguides, Silicon, Refractive index, Plasma enhanced chemical vapor deposition, Integrated optics, Microelectromechanical systems, Thin films, Modulation, Micromachining, Silica

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Proceedings Article | 25 March 2003 Paper

Interferometry system for the mechanical characterization of membranes with silicon oxynitride thin films fabricated by PECVD

Michal Jozwik, Patrick Delobelle, Andrei Sabac, Christophe Gorecki

Proceedings Volume 4945, (2003) https://doi.org/10.1117/12.468412

KEYWORDS: Thin films, Plasma enhanced chemical vapor deposition, Refractive index, Silicon, Interferometry, Silicon films, Plasma, Thin film deposition, Interferometers, Waveguides

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Proceedings Article | 19 April 2002 Paper

Optical interferometry investigation of internal stress and optomechanical characteristics of silicon-oxynitride thin films fabricated by PECVD

Michal Jozwik, Andrei Sabac, Christophe Gorecki

Proceedings Volume 4755, (2002) https://doi.org/10.1117/12.462881

KEYWORDS: Thin films, Plasma enhanced chemical vapor deposition, Silicon, Refractive index, Silicon films, Interferometry, Interferometers, Thin film deposition, Plasma, Optical interferometry

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Proceedings Article | 30 October 2001 Paper

Characterization of internal stress of silicon oxinitride thin films fabricated by plasma-enhanced chemical vapor deposition: applications in integrated optics

Christophe Gorecki, Andrei Sabac, Michal Jozwik, Seung Lee

Proceedings Volume 4596, (2001) https://doi.org/10.1117/12.447343

KEYWORDS: Thin films, Plasma enhanced chemical vapor deposition, Silicon, Refractive index, Silicon films, Waveguides, Hydrogen, Integrated optics, Plasma, Microopto electromechanical systems

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Showing 5 of 13 publications

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