Dr. Anton Lagosh Profile

Dr. Anton Lagosh

at Silicon Austria Labs GmbH

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Publications (1)

Proceedings Article | 5 March 2021 Presentation + Paper

Smart slit assembly employing continuously tunable MEMS shutter

Anton Lagosh, Gergely Huszka, Hamed Sattari, Berit Ahlers, Benedikt Guldimann, Grégoire Kerr, Mauro Melozzi, Peyman Rahnama, Takeshi Nishizawa, Niels Quack

Proceedings Volume 11697, 116970P (2021) https://doi.org/10.1117/12.2583149

KEYWORDS: Microelectromechanical systems, Camera shutters, Wafer-level optics, Silica, Modulation, Waveguides, Vapor etching, Spectrometers, Silicon, Semiconducting wafers

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