Dr. Behcet Alpat
at Maprad
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 3 October 2022 Presentation
Proceedings Volume PC12195, PC1219503 (2022) https://doi.org/10.1117/12.2634029
KEYWORDS: Infrared coatings, Technetium, Atomic layer deposition, Absorption, Plasmonics, Nanoimprint lithography, Humidity, Fabrication, Etching, Deposition processes

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