Dr. Björn Hansson Profile

Dr. Björn Hansson

at Excillum AB

SPIE Involvement:

Author

Proceedings Article | 24 March 2006 Paper

High-power low cost drive laser for LPP source

Igor Fomenkov, Björn Hansson, Norbert Böwering, Alex Ershov, William Partlo, Vladimir Fleurov, Oleh Khodykin, Alexander Bykanov, Curtis Rettig, Jerzy Hoffman, Ernesto Vargas L., Juan Chavez, William Marx, David Brandt

Proceedings Volume 6151, 61513X (2006) https://doi.org/10.1117/12.655733

KEYWORDS: Gas lasers, Molybdenum, Carbon monoxide, Optical amplifiers, Laser applications, Neodymium lasers, Oscillators, Extreme ultraviolet, Excimer lasers, High power lasers

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We report on the approach for a high-power high-beam-quality drive laser system that is used for a laser-produced plasma (LPP) EUV source. Cymer has conducted research on a number of solutions for a multi-kW drive laser system that satisfy high volume production requirements. Types of lasers to be presented include XeF at 351 nm and CO₂ at 10.6 micron. We report on a high efficiency XeF amplifier with a 3rd harmonic Nd:YLF master oscillator operated in the 6 to 8 kHz range and a CO₂ laser system with Q-switched cavity dumped master oscillator and RF pumped fast axial flow amplifiers operated in the 10 to 100 kHz range. CO₂ laser short pulse gain and optical isolation techniques are reported. Optical performance data and design features of the drive laser system are discussed, as well as a path to achieve output power scaling to meet high volume manufacturing (HVM) requirements and beyond. Additionally, the electrical efficiency as a component of cost of operation is presented. Development of a drive laser with sufficient output power, high beam quality, and economical cost of operation is critical to the successful implementation of a laser-produced-plasma (LPP) EUV source for HVM applications. Cymer has conducted research on a number of solutions to this critical need. We report our progress on development of a high power system with two gas-discharge power amplifiers to produce high output power with high beam quality. We provide optical performance data and design features of the drive laser as well as a path to output power scaling to meet HVM requirements. Development of a drive laser for LPP EUV source is a challenging task. It requires multi-kW laser output power with short pulse duration and diffraction limited beam quality. In addition, this system needs to be very reliable and cost-efficient to satisfy industry requirements for high volume integrated circuit manufacturing. Feasibility studies of high power laser solutions that utilize proven laser technologies in high power optical gain modules and deliver required beam properties have been performed and are reported.

Proceedings Article | 24 March 2006 Paper

EUV source collector

Norbert Böwering, Alex Ershov, William Marx, Oleh Khodykin, Björn Hansson, Ernesto Vargas L., Juan Chavez, Igor Fomenkov, David Myers, David Brandt

Proceedings Volume 6151, 61513R (2006) https://doi.org/10.1117/12.656462

KEYWORDS: Mirrors, Extreme ultraviolet, Coating, Reflectivity, Multilayers, Plasma, Tin, Solids, Light sources, Atomic force microscopy

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Proceedings Article | 23 March 2006 Paper

LPP EUV source development for HVM

Björn Hansson, Igor Fomenkov, Norbert Böwering, Alex Ershov, William Partlo, David Myers, Oleh Khodykin, Alexander Bykanov, Curtis Rettig, Jerzy Hoffman, Ernesto Vargas, Rod Simmons, Juan Chavez, William Marx, David Brandt

Proceedings Volume 6151, 61510R (2006) https://doi.org/10.1117/12.656687

KEYWORDS: Extreme ultraviolet, Tin, Plasma, Lithium, Extreme ultraviolet lithography, Mirrors, Ions, Prototyping, Reflectivity, Metrology

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Proceedings Article | 10 May 2005 Paper

Metrology of laser-produced plasma light source for EUV lithography

N. Boewering, J. Hoffman, O. Khodykin, C. Rettig, B. Hansson, A. Ershov, I. Fomenkov

Proceedings Volume 5752, (2005) https://doi.org/10.1117/12.600809

KEYWORDS: Extreme ultraviolet, Plasma, Metrology, Mirrors, Sensors, Tin, Optical filters, Spectroscopy, Lithium, Photodiodes

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Proceedings Article | 6 May 2005 Paper

EUV source system development update: advancing along the path to HVM

D. Myers, I. Fomenkov, B. Hansson, B. Klene, D. Brandt

Proceedings Volume 5751, (2005) https://doi.org/10.1117/12.601052

KEYWORDS: Extreme ultraviolet, Lithium, Ions, Tin, Mirrors, Extreme ultraviolet lithography, Plasma, Xenon, Excimer lasers, Neodymium lasers

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Proceedings Article | 3 September 1998 Paper

Matched filtering and multiple-hypothesis tracking applied to C-fiber action potentials recorded in human nerves

Bjorn Hansson, Clemens Forster, Erik Torebjork

Proceedings Volume 3373, (1998) https://doi.org/10.1117/12.324653

KEYWORDS: Action potentials, Performance modeling, Electronic filtering, Filtering (signal processing), Nerve, Signal detection, Signal to noise ratio, Sensors, Detection and tracking algorithms, Target detection

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Proceedings Article | 27 May 1998 Paper

Combined actively and passively Q-switched microchip laser

Magnus Arvidsson, Bjorn Hansson, Martin Holmgren, Carsten Lindstrom

Proceedings Volume 3265, (1998) https://doi.org/10.1117/12.308663

KEYWORDS: Q switched lasers, Crystals, Modulators, Pulsed laser operation, Switching, Semiconductor lasers, Laser crystals, Q switches, Q switching, Mirrors

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Showing 5 of 7 publications

Conference Committee Involvement (4)

Advances in Laboratory-based X-Ray Sources, Optics, and Applications VII

13 August 2019 | San Diego, California, United States

Advances in Laboratory-based X-Ray Sources, Optics, and Applications VI

7 August 2017 | San Diego, California, United States

Advances in Laboratory-based X-Ray Sources, Optics, and Applications V

30 August 2016 | San Diego, California, United States

Advances in Laboratory-based X-Ray Sources, Optics, and Applications IV

10 August 2015 | San Diego, California, United States

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