Dr. Boyang Chor Profile

Dr. Boyang Chor

at Onto Innovation Inc

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Publications (1)

Proceedings Article | 27 April 2023 Presentation + Paper

Characterization of asymmetries in 3D NAND memory devices

Jie Li, Shashank Srivastava, Joyce Li, Zhuo Chen, Petar Žuvela, Boyang Chor, Jinyu Deng, Haodong Qiu, YaChing Chang, Sadao Takabayashi, Xadric Yiew, Bo Hui Ng, Rohit Kothari, Dan Engelhard, Han Yang Tan

Proceedings Volume 12496, 124960F (2023) https://doi.org/10.1117/12.2658148

KEYWORDS: Education and training, Semiconducting wafers, Overlay metrology, Critical dimension metrology, Mueller matrices, 3D metrology, Data modeling, 3D modeling, Machine learning, Spectral response

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