Mr. Chih Hsien Hsu Profile

Chih Hsien Hsu

Manager at Taiwan Semiconductor Manufacturing Co Ltd

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Publications (2)

Proceedings Article | 3 September 1998 Paper

Novel method to eliminate SOG-etching-back-induced random particle

Chih-Hsieh Hsu, Chao-Hsin Chang, M. Yu, Y. Peng

Proceedings Volume 3507, (1998) https://doi.org/10.1117/12.324356

KEYWORDS: Particles, Semiconducting wafers, Calibration, Polymers, Etching, Integrated circuits, Manufacturing, Oxides, Phase modulation, Very large scale integration

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Proceedings Article | 25 August 1997 Paper

Compatibility of top antireflective coatings and photoresists

Ju-Yau Li, Po-Wei Chuang, Chih-Hsieh Hsu, Ben Jang, Wen-Jye Chung

Proceedings Volume 3213, (1997) https://doi.org/10.1117/12.284637

KEYWORDS: Coating, Photoresist materials, Antireflective coatings, Semiconducting wafers, Lithography, Thin film coatings, Scanning electron microscopy, Liquids, Photoresist developing, Optical lithography

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