Dr. Carlo Fanara Profile

Dr. Carlo Fanara

at Ian Botan

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 8 April 2011 Paper

High-brightness EUV light source for HVM

Peter Choi, Sergey Zakharov, Raul Aliaga-Rossel, Aldrice Bakouboula, Jeremy Bastide, Otman Benali, Philippe Bove, Michèle Cau, Grainne Duffy, Carlo Fanara, Wafa Kezzar, Blair Lebert, Keith Powell, Ouassima Sarroukh, Luc Tantart, Clement Zaepffel, Vasily Zakharov

Proceedings Volume 7969, 796935 (2011) https://doi.org/10.1117/12.892554

KEYWORDS: Extreme ultraviolet, Plasma, Photodiodes, Data modeling, Tin, Multiplexing, Extreme ultraviolet lithography, Light sources, Photomasks, Capillaries

Read Abstract +

Proceedings Article | 6 July 2006 Paper

A new reactive atom plasma technology (RAPT) for precision machining: the etching of ULE optical surfaces

Carlo Fanara, Paul Shore, John Nicholls, Nicholas Lyford, Phil Sommer, Peter Fiske

Proceedings Volume 6273, 62730A (2006) https://doi.org/10.1117/12.673080

KEYWORDS: Plasma, Argon, Etching, Atmospheric plasma, Surface finishing, Optics manufacturing, Chemical species, Polishing, Silicon carbide, Fluorine

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years