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Cyril Bellegarde
at CEA-LETI
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Publications (3)
Proceedings Article | 4 March 2019 Presentation + Paper
Technological advances on Si and Si3N4 low-loss waveguide platforms for nonlinear and quantum optics applications
Proceedings Volume 10933, 1093309 (2019) https://doi.org/10.1117/12.2508617
KEYWORDS: Silicon, Annealing, Waveguides, Frequency combs, Line edge roughness, Silicon photonics, Photonics, Nonlinear optics, Absorption, Hydrogen
Proceedings Article | 22 February 2018 Presentation + Paper
Optimization of H2 thermal annealing process for the fabrication of ultra-low loss sub-micron silicon-on-insulator rib waveguides
Cyril Bellegarde, Erwine Pargon, Corrado Sciancalepore, Camille Petit-Etienne, Olivier Lemonnier, Karen Ribaud, Jean-Michel Hartmann, Philippe Lyan
Proceedings Volume 10537, 1053706 (2018) https://doi.org/10.1117/12.2289564
KEYWORDS: Annealing, Waveguides, Silicon, Line edge roughness, Optical lithography, Atomic force microscopy, Scanning electron microscopy, Interfaces, Wave propagation, Photomasks
Proceedings Article | 23 February 2017 Presentation + Paper
Improvement of sidewall roughness of sub-micron silicon-on-insulator waveguides for low-loss on-chip links
Cyril Bellegarde, Erwine Pargon, Corrado Sciancalepore, Camille Petit-Etienne, Vincent Hughes, Jean-Michel Hartmann, Philippe Lyan
Proceedings Volume 10108, 1010816 (2017) https://doi.org/10.1117/12.2250344
KEYWORDS: Oxidation, Waveguides, Silicon, Optical lithography, Photonic integrated circuits, Scattering, Light scattering, Optical testing, Silica, Thermal oxidation, 3D modeling, Line edge roughness, Photomasks, Annealing, Plasma, Photoresist processing, Plasma treatment
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