Dr. Daixie Chen Profile

Dr. Daixie Chen

at Institute of Electrical Engineering

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Publications (1)

Proceedings Article | 24 January 2019 Paper

Study of the linewidth measurement with scanning electron microscope based on laser interference principle

Bohua Yin, Mingzhang Chu, Guanglu Xu, Xue Li, Junbiao Liu, Daixie Chen, Han Li, Chao Jiang, Xiaoyong Cai

Proceedings Volume 10840, 108400U (2019) https://doi.org/10.1117/12.2505766

KEYWORDS: Scanning electron microscopy, Metrology, Digital signal processing, Interferometers, Electron microscopes, Image processing, Semiconductors, Image resolution, Raster graphics, Calibration

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