Dr. Dale Huang Profile

Dr. Dale Huang

Engineering Program Manager at ASML

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Publications (1)

Proceedings Article | 2 April 2014 Paper

Tracking defectivity of EUV and SADP processing using bright-field inspection

Nadine Alexis, Chris Bencher, Yongmei Chen, Huixiong Dai, Kfir Dotan, Dale Huang, Alison Nalven, Chris Ngai, Gaetano Santoro, Bharath Vijayaraghavan, Peng Xie, Jun Xue

Proceedings Volume 9050, 905030 (2014) https://doi.org/10.1117/12.2048356

KEYWORDS: Inspection, Polarization, Extreme ultraviolet, Semiconducting wafers, Extreme ultraviolet lithography, Lithography, Photomasks, Signal to noise ratio, Wafer inspection, Metrology

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