Dr. Damon Farmer Profile

Dr. Damon Farmer

at IBM Thomas J. Watson Research Ctr.

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 25 May 2022 Presentation + Paper

L. Buzi, D. Koty, M. Hopstaken, J. Bruley, L. Gignac, M. Sagianis, D. Farmer, H. Miyazoe, A. Mosden, S. Engelmann, R. Bruce

Proceedings Volume 12056, 1205609 (2022) https://doi.org/10.1117/12.2614303

KEYWORDS: Plasma, Etching, Plasma enhanced chemical vapor deposition, Oxygen, Argon, Refractive index, Hydrogen, FT-IR spectroscopy, Wet etching

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Keywords/Phrases