Ms. Dandan Cui Profile

Dandan Cui

at Changchun University of Science and Technology

SPIE Involvement:

Author

Publications (1)

This will count as one of your downloads.

You will have access to both the presentation and article (if available).

DOWNLOAD NOW

This content is available for download via your institution's subscription. To access this item, please sign in to your personal account.

Email or Username Forgot your username?

Password Forgot your password?

Show

Keep me signed in

No SPIE account? Create an account

Proceedings Article | 5 November 2015 Paper

Structure release of silicon micro-channel based on wet etching

Dandan Cui, Guozheng Wang, Jikai Yang, Haibin Li, Qingduo DuanMu

Proceedings Volume 9795, 97952H (2015) https://doi.org/10.1117/12.2217556

KEYWORDS: Corrosion, Silicon, Etching, Silica, Surface roughness, Silicon films, Wet etching, Semiconducting wafers, Interfaces, Electrochemical etching

Read Abstract +

Based on wet etching theory, the silicon microchannel structure after electrochemical etching was released in TMAH solution to obtain the through-hole microchannel. The silicon wafer with the different resistivity was selected as the substrate of microchannel plate, the TMAH solution was selected in mass concentration of 28.5wt%, and the SiO₂ passivation layer with the thickness of 200nm was prepared by thermal oxidation for protection of side-wall of microchannel. Contrary to the problem encountered in wet etching, Firstly, the corrosion characteristics of silicon and SiO₂ thin film in TMAH solution were investigated, respectively. In addition, the effects of the pH values of TMAH solution on corrosion characteristics in microstructure releasing of silicon microchannel were studied and analyzed. The experiments show that the silicon wafer with high resistivity can be easily etched, the etching rate of SiO₂ film in TMAH is uniform, and adjusting the pH value of etching solution to make it constant during etching can effectively increase the corrosion rate and decrease the surface roughness of samples.

My Library

You currently do not have any folders to save your paper to! Create a new folder below.

Folder Name

Folder Description

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks. You are receiving this notice because your organization may not have SPIE eBooks access.*

*Shibboleth/Open Athens users─please sign in to access your institution's subscriptions.

To obtain this item, you may purchase the complete book in print or electronic format on SPIE.org.

ORGANIZATIONAL
Sign in with credentials provided by your organization.

Organizational Username

Organizational Password

Show/Hide Password

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members:

Non-members: ADD TO CART

Keywords/Phrases

Search In:

Publication Years