Dr. David Abraham Profile

Dr. David Abraham

at GalayOr Inc

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Publications (1)

SPIE Journal Paper | 1 April 2006

Thickness of silicon-nitride antireflective coating on a silicon waveguide measured by an integrated micromechanical gauge

Michael Tilleman, Dan Haronian, David Abraham

JM3, Vol. 5, Issue 02, 023011, (April 2006) https://doi.org/10.1117/12.10.1117/1.2198815

KEYWORDS: Silicon, Waveguides, Antireflective coatings, Semiconducting wafers, Coating, Reflection, Refractive index, Reactive ion etching, Etching, Silicon films

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