The development of nanotechnology gives new possibilities for fabrication of high efficiency X-ray optical elements. The stacked multilevel crystal Zone Plate (ZP) is fabricated by means of high resolution negative tone inorganic HSQ (Hydrogen Silsesquioxane or XR-1541) electron-beam resist. About 80% of the HSQ resist became SiO2 after electron beam lithography. This is a simple method to fabricate ZPs with SiO2 masks. Stacked multilevel silicon ZPs consisting of bi-level zone profiles have been investigated. The composed multilevel ZP consists of two separate ZPs which have different structures. The distance between ZPs varied from 0mm up to 2mm. We recorded the maximal efficiency when the distance between ZPs varied from 0μm up to 150μm (about same efficiency). The efficiency of stacked multilevel crystal ZP has decreased when the distance between ZPs has varied from 0μm up to 2mm. The efficiency of the phase ZP is 40.5%. The maximum efficiency for bi-level ZP without absorption is 68.4%. We obtain theoretically 54.6% and experimentally 47% efficiency for the stacked bi-level ZP when the distance between ZPs was 0μm. The experimentally and theoretically investigations were done for x-ray energy at the 8 KeV and 12.4 KeV. The radial distribution of intensity is determined as a convolution of the zone plate transmission function and the Kirchhoff propagator in par-axial approximation. The algorithm is based on the FFT procedure and studied by means of computer programming simulation.
We present results of imaging properties of the lens-crystal system for hard x-ray radiation. The system is based on a
beryllium parabolic refractive lens placed in front of the sample, and an asymmetric silicon single crystal placed behind
the sample. The beryllium refractive lens has such advantages as small absorption and high efficiency which allow high
spatial resolution. We demonstrate a phenomenon of image formation using the Bragg reflection of focused x-ray beam
from asymmetric single crystal. For recording the magnified x-ray phase contrast image the asymmetric single crystal Si
(220) with asymmetry factor b = 1/6 was used at the x-ray energy 15 keV. The experiment was performed at the beam
line BM-5 of the European Synchrotron Radiation Facility (ESRF). The peculiarities of image transformation are
investigated both experimentally and theoretically when the focus of refractive lens is moved across and along the
optical axis. The computer program was elaborated for a simulation of image formation in the system based on the
refractive lens and the crystal with asymmetric Bragg diffraction. The algorithm is based on the FFT procedure for
making a transition from a real space to a plane wave space.n/mswo
KEYWORDS: Diffraction, Zone plates, Silicon, Electron beam lithography, Hard x-rays, Crystals, Scanning electron microscopy, Laser crystals, Lithography, Nanotechnology
We present the first results of fabrication the circular zone plate by means of high resolution negative tone inorganic
HSQ (Hydrogen Silsesquioxane or XR-1541) electron-beam resist. Fresnel zone plates (FZPs) has been fabricated on the
surface of silicon crystals for the energy from 8keV up to 100keV by electron beam lithography. Three different FZPs
have been fabricated; circular FZP for the first diffraction order, circular compound FZP for the first and third diffraction
order, and linear FZP for the first and second diffraction order. The parameters of the compound FZPs for first and third
order were the following: the focal distance of first and third orders FZP is F =13.229cm for 0.1nm wavelength, the
entire aperture is 400.0016μm, the width of the outermost zones of the first and third orders is 100nm, and the number of
the first and third order zones is 1223.
A new hard X - ray hologram with using crystal Fresnel zone plates (ZP) has been described. An image of Fourier
hologram for hard X- ray is presented. X-ray phase contrast methods for medical diagnostics techniques are presented.
We have developed an X-ray microscope, based on micro focus source which is capable of high resolution phasecontrast
imaging and holograms. We propose a new imaging technique with the x-ray energy 8 keV. The method is
expected to have wide applications in imaging of low absorbing samples such as biological and medical tissue. We used
FIB to reproduction three dimension structures of damaged spinal cord of rat before and after combined treatment with
NT3 and NR2D. PUBLISHER'S NOTE 12/16/09: This SPIE Proceedings paper has been updated with an erratum correcting several issues throughout the paper. The corrected paper was published in place of the earlier version on 9/1/2009. If you purchased the original version of the paper and no longer have access, please contact SPIE Digital Library Customer Service at CustomerService@SPIEDigitalLibrary.org for assistance.
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