Silicon nitride (Si3N4) is a leading platform in integrated photonics, providing unique passive functionalities, while maintaining compatibility with complementary metal-oxide-semiconductor processes and scalable and low-cost high-volume production. However, the moderate index contrast of the Si3N4 platform makes it difficult to implement efficient vertical surface grating couplers. In this work, we present efficient and robust fiber-chip grating couplers on native and hybrid Si3N4 platforms. Minimum coupling losses between -5 dB and -3 dB were measured for single-etch fabricated devices near 1.55 μm wavelength. Moreover, by leveraging the amorphous-silicon overlay on top of the Si3N4 platform, we develop hybrid single-etch grating couplers, with a coupling loss approaching 1 dB. The demonstrated grating couplers are promising for SiN integrated photonics, enabling a rapid and cost-effective chip interfacing with standard optical fibers. This opens up novel opportunities for rising applications, including optical communications, nonlinear optics, or quantum information sciences.
Periodically patterning silicon with a subwavelength period enables flexible control of the propagation of light and sound in silicon photonic circuits. In this invited presentation, we will show our most recent demonstration of supercontinuum generation in the near-IR and mid-IR using suspended silicon waveguides. We will also discuss our recent results on subwavelength engineering of photons and phonons in suspended and non-suspended silicon optomechanical cavities
Periodically patterning silicon with a subwavelength pitch opens new degrees of freedom to control the propagation of light and sound in silicon photonic circuits with unprecedented flexibility. In this invited presentation, we will show our most recent results on the use suspended silicon waveguides for supercontinuum generation in the near-IR and mid-IR. We will also discuss our recent demonstrations of subwavelength engineering of photons and phonons in suspended and non-suspended silicon optomechanical cavities
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.