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Do-Yeon Hwang
at Korea Research Institute of Standards and Science
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Publications (1)
Proceedings Article | 12 November 2024 Paper
Performance testing system for extreme ultraviolet lithography components
Wooram Kim, Eunseok Choe, Do-Yeon Hwang, Sangwoo Kang, Won Chegal, Jung-Hyung Kim
Proceedings Volume 13215, 132150W (2024) https://doi.org/10.1117/12.3033688
KEYWORDS: Extreme ultraviolet, Extreme ultraviolet lithography, EUV optics, Photoresist materials, Optical properties, Mirrors, Pellicles, Vacuum chambers, Transmittance, Reflectivity
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