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Duane Hudgins
at ETH Zürich
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Author
Publications (4)
Proceedings Article | 16 October 2017 Presentation
Improved cost-of-ownership for a droplet-based LPP light source for HVM EUV mask and blank inspection (Conference Presentation)
Markus Brandstätter, Marco Weber, Duane Hudgins, Jeremy Nickol, Flori Alickaj, Reza Abhari
Proceedings Volume 10450, 1045012 (2017) https://doi.org/10.1117/12.2280597
KEYWORDS: Extreme ultraviolet, Inspection, Light sources, Ions, EUV optics, Photomasks, Extreme ultraviolet lithography, Pellicles, Reflectivity, Plasma
SPIE Journal Paper | 5 August 2015 Open Access
Spectral emission properties of a laser-produced plasma light source in the sub-200 nm range for wafer inspection applications
Nadia Gambino, Bob Rollinger, Duane Hudgins, Reza Abhari
JM3, Vol. 14, Issue 03, 034002, (August 2015) https://doi.org/10.1117/12.10.1117/1.JMM.14.3.034002
KEYWORDS: Plasma, Vacuum ultraviolet, Tin, Gallium, Light sources, Ions, Indium, Extreme ultraviolet, Calibration, Inspection
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Proceedings Article | 19 March 2015 Paper
Spectral emission properties of a LPP light source in the sub-200nm range for wafer inspection applications
Nadia Gambino, Bob Rollinger, Duane Hudgins, Reza Abhari, F. Abreau
Proceedings Volume 9424, 942418 (2015) https://doi.org/10.1117/12.2085806
KEYWORDS: Plasma, Vacuum ultraviolet, Tin, Gallium, Light sources, Indium, Inspection, Extreme ultraviolet, Ions, Wafer inspection
Proceedings Article | 19 March 2015 Paper
LPP light source for actinic HVM inspection applications
Bob Rollinger, Nadia Gambino, Duane Hudgins, Alexander Sanders, Markus Brandstätter, Reza Abhari, F. Abreau
Proceedings Volume 9422, 94222K (2015) https://doi.org/10.1117/12.2085794
KEYWORDS: Extreme ultraviolet, Plasma, Inspection, Tin, Extreme ultraviolet lithography, Coded apertures, Aluminium phosphide, Light sources, Photomasks, Control systems
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