Dr. Ehsan Kabiri Rahani Profile

Dr. Ehsan Kabiri Rahani

at ASML

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Publications (1)

Proceedings Article | 10 April 2024 Presentation + Paper

Affordable optical proximity correction runtime for EUV curvilinear mask tape-out flow

Ping Digaum, Kazuto Kajiwara, Nobue Kosa, Ming-Chuan Yang, Ezequiel Vidal Russell, Jianhong Qiu, Omar Ndiaye, Nicolas Martin, Hesham Omar, Ehsan Kabiri Rahani, Peigen Cao, Michael Crouse

Proceedings Volume 12954, 129540T (2024) https://doi.org/10.1117/12.3009981

KEYWORDS: Optical proximity correction, Extreme ultraviolet, Shadows, Printing, Source mask optimization, Lithography, Industry, Mask making

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