Dr. El-Mostafa Bourim Profile

Dr. El-Mostafa Bourim

at SAMSUNG Electro-Mechanics

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Author

Publications (3)

SPIE Journal Paper | 1 January 2010

Fine-pitch high-efficiency spatial optical modulator for mobile display applications

Jong Hyeong Song, Sang Kyeong Yun, Hee-Yeoun Kim, Seungdo An, Heung-Woo Park, Yoon Joon Choi, Victor Yurlov, Anatoly Lapchuk, Chung Mo Yang, Sung Jun Lee, Jae Wook Jang, Ki Un Lee, Ki Suk Woo, El Bourim

JM3, Vol. 9, Issue 01, 013026, (January 2010) https://doi.org/10.1117/12.10.1117/1.3309711

KEYWORDS: Ferroelectric materials, Optical modulators, Actuators, Diffraction, Aluminum, Mirrors, Thermal effects, Silicon, Semiconducting wafers, Image quality

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Proceedings Article | 24 February 2009 Paper

Fine-pitch high-efficiency spatial optical modulator for mobile display applications

Jong Hyeong Song, Sang Kyeong Yun, Hee Yeoun Kim, Seungdo An, Heung Woo Park, Yoon Joon Choi, Victor Yurlov, Anatoliy Lapchuk, Chung Mo Yang, Sung Jun Lee, Jae Wook Jang, Ki Un Lee, Ki Suk Woo, El Bourim

Proceedings Volume 7208, 72080T (2009) https://doi.org/10.1117/12.808892

KEYWORDS: Aluminum, Ferroelectric materials, Silicon, Mirrors, Thermal effects, Actuators, Laser based displays, Temperature metrology, Modulation, Optical modulators

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Diffractive spatial optical modulators (SOM) with fine pitch pixel array were introduced for the mobile applications of laser projection display which requires the small volume, low power consumption and high optical efficiency. Micromechanical designs of piezoelectric (PZT) actuator and mirror ribbon structure were optimized for small volume, but keeping the same level of the other performance. Even though the same design rule and fabrication equipment were used for 10 um pitch SOM and 16 um pitch SOM, the optical efficiency of the fine pitch SOM was 78 % for the 0th order diffraction and is better than that of 16 um pitch SOM (73%). The full on/off contrast ratio has no difference between 10 um pitch and 16 um pitch SOM. All the optical characteristics coincide well with the theoretical estimations. High displacement of 500nm, which is enough to modulate the three Red, Green and Blue colors were achieved by the control of the thicknesses and stresses of constituent structural layers. It was found that the stress of Pt/PZT/Pt actuating layer was the main parameter affecting the initial gap height of the ribbon and also its displacement. For improving the optical properties of the SOM devices, the required ribbon-flatness could be achieved by applying a stress gradient on the SiN layer to compensate for the stress unbalance between Al mirror and SiN supprting layer. The temperature sensitive characteristics of the SOM device, which degrades the image quality, could be minimized by a mechanical compensation method using a thermal expansion effect of Si substrates. This concept could be applied in most of the bridge type MEMS structure. The most critical parameter which limit the SOM device lifetime was found to be the ribbon displacement degradation. By using a temperature accelerating lifetime measurement method based on the displacement degradation the estimated lifetime was more than 4,000 hrs and is of acceptable level in the mobile application. In short, the developed fine pitch SOM device, for making small volume of optical module, has sufficient response time and ribbon displacement for modulating the red, blue and green colors with one SOM chip and is suitable for high quality embedded laser projection displays. Optical module with VGA is successfully demonstrated for its potential applications in mobile laser projection display such as a embed projection cellular phone.

Proceedings Article | 21 February 2008 Paper

A novel diffractive micro-optical modulator for mobile display applications

Sang Kyeong Yun, JongHyeong Song, SeungDo An, InJae Yeo, YoonJoon Choi, YeongGyu Lee, HeungWoo Park, KyuBum Han, HaengSeok Yang, Victor Yurlov, Ihar Shyshkin, Anatoliy Lapchuk, HeeYeoun Kim, JaeWook Jang, JeHong Kyoung, JeongSuong Yang, SangKee Yoon, ChangSu Park, JongPil Cheong, YoungNam Hwang, KiSuk Woo, SeungWon Ryu, SeungWoo Lee, ChongMann Koh, YoungKi Baek, DaeHo Bae, HyunKee Lee, JaeHoon Lee, YungHo Ryu, HaeYeon Hwang, ChungMo Yang, OhkKun Lim, DongHyun Park, SeHwan An, JunHee Bae, SungMin Cho, BackSoon Go, SeokKee Hong, HoPhil Jung, SangJin Kim, KiUn Lee, JiHyun Park, JuHwan Yang, GiYoung Byun, SungHo Byun, YoungJin Cho, ChunGi Kim, JooHong Kim, SunKi Kim, SungIl Lee, WhaHyung Lee, KwanYoung Oh, SungKyung Oh, WooChul Shin, ByungKi Song, ElMostafa Bourim

Proceedings Volume 6887, 688702 (2008) https://doi.org/10.1117/12.762568

KEYWORDS: Glasses, Mirrors, Ferroelectric materials, Packaging, Metals, Laser based displays, Diffraction gratings, Modulation, Silicon, Diffraction

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