Mr. Gregory J. Dick Profile

Gregory J. Dick

Senior Member of Technical Staff

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Publications (2)

Proceedings Article | 20 March 2018 Presentation + Paper

Optimization of optical proximity correction to reduce mask write time using genetic algorithm

Gregory Dick, Liang Cao, Abhishek Asthana, Jing Cheng, David Power

Proceedings Volume 10588, 1058806 (2018) https://doi.org/10.1117/12.2297400

KEYWORDS: Optical proximity correction, Genetic algorithms, Optimization (mathematics), Photomasks, Data processing

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Proceedings Article | 5 May 2005 Paper

Model-based verification for first time right manufacturing

James Bruce, Edward Conrad, Gregory Dick, D. John Nickel, Jacek Smolinski

Proceedings Volume 5756, (2005) https://doi.org/10.1117/12.600552

KEYWORDS: Optical proximity correction, Lithography, Photomasks, Manufacturing, Data modeling, Semiconducting wafers, Model-based design, Data archive systems, Error analysis, Reticles

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