Mr. Guobin Sun Profile

Guobin Sun

at Xi'an Univ of Technology

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Proceedings Article | 15 January 2021 Paper

Research on Ion beam polishing efficiency with changing different beam diameters

Guobin Sun, ShiLei Jiang, Jin Zhang

Proceedings Volume 11761, 1176123 (2021) https://doi.org/10.1117/12.2585251

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In order to improve the ability of ion beam polishing efficiency and shape modification. In order to solve the problem of low polishing convergence ratio in particular, we use different beam diameters and peak removal rates of removal functions to simulate polishing process and efficiency. MATLAB tool was used to accurately fit the removal functions, and a mathematical model of ion beam simulation polishing was established to simulate the removal characteristics of ion beams with different beam diameters under different superposition spacing. A series of simulation results with different residence time distribution and residual precision were obtained by optimizing the polishing simulation algorithm, and the simulation rules were analyzed to select the most appropriate aperture and overlay spacing. Polishing simulation analysis can not only optimize residence time distribution, but also reduce machining time. It can also optimize the processing technology to achieve pre-processing prediction and achieve higher polishing efficiency while achieving the target accuracy requirements. On the basis of simulation, we polished φ120mm fused quartz flat samples with initial surface shape PV of 1079.59nm and RMS of 304.95nm. After 11 hours of polishing, the shape accuracy PV were 95.63nm, the RMS is 8.99nm, and the mean square value convergence ratio of the surface shape reaches 33.92.This simulation approach provides a effective guidance for ion beam high precision and efficiency polishing.

Proceedings Article | 13 October 2010 Paper

Study on the relationship between deflection angle and scanning angular of optical scanner

Guobin Sun, Qian Mi

Proceedings Volume 7656, 765660 (2010) https://doi.org/10.1117/12.865921

KEYWORDS: Scanners, Optical scanning, Optical testing, Reflection, Laser scanners, Laser systems engineering, Spectroscopy, MATLAB, Thin films, Modulation

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The optical scanner is a mature scanning device, which is mainly used in change light path, with high scanning speed, with advantages of scanning angle and frequency fast adjustable and steady. Now widely used in laser scanning system of the laser labeler and dual-beam spectrometer. When a certain angle beam incident scanner and the deflection angle were constant, the reflecting beams produce a certain range of scanning angle. With the deflection angle of the scanner changes, the scanning angle of the reflecting beam will change. The author make an intensive study of the relationship between deflection angle and scanning angular founds that follows a definitive evolution and verified it. This conclusion has very important instructional significance in the practical application and research of the optical scanner.

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