Dr. Guozheng Wang Profile

Dr. Guozheng Wang

at Changchun Univ. of Science and Technology

SPIE Involvement:

Author

Publications (23)

Proceedings Article | 20 February 2018 Paper

Silicon macroporous arrays with high aspect ratio prepared by ICP etching

Guozheng Wang, Bingchen Yang, Ji Wang, Jikai Yang, Qingduo Duanmu

Proceedings Volume 10697, 106970Y (2018) https://doi.org/10.1117/12.2309909

KEYWORDS: Etching, Silicon, Reactive ion etching, Ions, Plasma, Shape memory alloys, Polymers, Semiconducting wafers, Plasma etching, Oxygen

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Proceedings Article | 5 November 2015 Paper

Structure release of silicon micro-channel based on wet etching

Dandan Cui, Guozheng Wang, Jikai Yang, Haibin Li, Qingduo DuanMu

Proceedings Volume 9795, 97952H (2015) https://doi.org/10.1117/12.2217556

KEYWORDS: Corrosion, Silicon, Etching, Silica, Surface roughness, Silicon films, Wet etching, Semiconducting wafers, Interfaces, Electrochemical etching

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Proceedings Article | 5 March 2015 Paper

Research on resistance properties of conductive layer materials of microchannel plate film dynode

Ling-ling Peng, Qingduo Duanmu, Ji-kai Yang, Guo-zheng Wang

Proceedings Volume 9521, 952110 (2015) https://doi.org/10.1117/12.2175993

KEYWORDS: Microchannel plates, Resistance, Silicon, Thin films, Atomic layer deposition, Low pressure chemical vapor deposition, Silicon films, Aluminum, Zinc oxide, Zinc

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Proceedings Article | 4 March 2015 Paper

Research on silicon microchannel arrays oxide insulation technology

Ke-xin Wu, Qingduo Duanmu, Guozheng Wang, Ji-kai Yang, Yang-qiang Kou

Proceedings Volume 9521, 95210Z (2015) https://doi.org/10.1117/12.2175992

KEYWORDS: Silicon, Silica, Oxygen, Oxides, Microchannel plates, Thermal oxidation, Silicon photomultipliers, Crystals, Electrochemical etching, Oxidation

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Proceedings Article | 16 August 2013 Paper

Influences of temperature and concentrations on morphology of TMAH anisotropic etching for silicon microchannel plate

Yong-zhao Liang, Qing-duo Duanmu, Ji-kai Yang, Guo-zheng Wang, Jin Chai, Fengyuan Yu, Yao Zhang, Shu-xiao Fan

Proceedings Volume 8912, 89120B (2013) https://doi.org/10.1117/12.2032481

KEYWORDS: Etching, Silicon, Anisotropic etching, Semiconducting wafers, Crystals, Temperature metrology, Scanning electron microscopy, Microchannel plates, Electrochemical etching, Microsystems

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Proceedings Article | 16 August 2013 Paper

Research on silicon microchannel array oxidation insulation technology and stress issues

Jin Chai, Mo Li, Yong-zhao Liang, Ji-kai Yang, Guo-zheng Wang, Qing-duo Duanmu

Proceedings Volume 8912, 89120J (2013) https://doi.org/10.1117/12.2033036

KEYWORDS: Silicon, Oxygen, Silica, Silicon films, Thin films, Thermal oxidation, Microchannel plates, Semiconducting wafers, Dielectrics, Oxidation

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Proceedings Article | 16 August 2013 Paper

Influence of surfactant on aperture of photo-electro-chemical etching for silicon microchannel plate

Feng-yuan Yu, Qing-duo Duanmu, Yao Zhang, Yong-zhao Liang, Jin Chai, Guo-zheng Wang, Ji-kai Yang

Proceedings Volume 8912, 891207 (2013) https://doi.org/10.1117/12.2031826

KEYWORDS: Silicon, Etching, High aspect ratio silicon micromachining, Microchannel plates, Ions, Electrochemical etching, Interfaces, Silicon photomultipliers, Hydrogen, Silica

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Proceedings Article | 16 August 2013 Paper

Influences of temperature and etching voltage on the surface morphology of photo-electro-chemical etching for silicon microchannel arrays

Yao Zhang, Qingduo Duanmu, Feng-yuan Yu, Yong-zhao Liang, Jin Chai, Guo-zheng Wang, Ji-kai Yang

Proceedings Volume 8912, 891209 (2013) https://doi.org/10.1117/12.2031882

KEYWORDS: Silicon, Etching, Semiconducting wafers, Scattering, Photomicroscopy, Electrodes, Microchannel plates, Temperature metrology, Microelectromechanical systems, Diffusion

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Proceedings Article | 19 March 2009 Paper

Spirooxazine-doped polymer films for reversible optical storage

Shencheng Fu, Guozheng Wang, Xin Wang, Qingduo Duanmu, Weilin Hu, Minggui Xie, Yichun Liu

Proceedings Volume 7125, 71250W (2009) https://doi.org/10.1117/12.818234

KEYWORDS: Molecules, Ultraviolet radiation, Birefringence, Polarization, Helium neon lasers, Holography, Polymer thin films, Polymers, Polymethylmethacrylate, Optical storage

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