Dr. Guozhuo Zhang Profile

Dr. Guozhuo Zhang

at Beijing Institute of Technology

SPIE Involvement:

Author

Publications (1)

This will count as one of your downloads.

You will have access to both the presentation and article (if available).

DOWNLOAD NOW

This content is available for download via your institution's subscription. To access this item, please sign in to your personal account.

Email or Username Forgot your username?

Password Forgot your password?

Show

Keep me signed in

No SPIE account? Create an account

Proceedings Article | 9 January 2023 Poster

Miniaturized confocal Raman microscopy based on MEMS mirror scanning

Guozhuo Zhang, Xu Wang, Han Cui, Weiqian Zhao

Proceedings Volume 12316, 123160J (2023) https://doi.org/10.1117/12.2655747

KEYWORDS: Confocal microscopy, Raman spectroscopy, Mirrors, Microelectromechanical systems, Microscopy, Spectral resolution, Microscopes, Signal detection, Optical scanning systems, Aspheric lenses

Read Abstract +

Confocal Raman microscopy can provide molecular distribution and three-dimensional topographic information of the substances, and is widely used in biomedical, material chemistry and physical science fields. However, in the traditional confocal Raman microscopes, the devices have large size, and scan lens and tube lens need conjugate placement taking up a lot of space, these make it difficult to reduce the size of the system. In order to solve the mentioned problems, we propose a scanning mechanism based on MEMS scanning mirror without scan lens and tube lens, and develop a miniature confocal Raman microscope base on this mechanism. In which the MEMS scanning mirror is used for lateral two-dimensional scanning of the laser beam, and an aspherical lens is placed directly behind the MEMS scanning mirror as the objective, as well as the MEMS mirror is positioned at the back focal plane of the aspherical lens to obtain a better spatial resolution. Compared with the traditional confocal Raman microscope based on galvanometer scanning, a miniaturized MEMS scanning mirror is used in our system, and scan lens and tube lens are omitted, which greatly reduces the size of this system. Meanwhile, the reduction of optical components and the shortening of the optical length improve the signal detection efficiency, which is very beneficial for the detection of relatively weak Raman spectral signals. The preliminary experimental results demonstrate the system lateral resolution and axial resolution are about 0.8 μm and 5.5 μm, respectively, and the Raman spectral resolution is 0.2 nm, which is basically consistent with the theoretical analysis.

My Library

You currently do not have any folders to save your paper to! Create a new folder below.

Folder Name

Folder Description

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks. You are receiving this notice because your organization may not have SPIE eBooks access.*

*Shibboleth/Open Athens users─please sign in to access your institution's subscriptions.

To obtain this item, you may purchase the complete book in print or electronic format on SPIE.org.

ORGANIZATIONAL
Sign in with credentials provided by your organization.

Organizational Username

Organizational Password

Show/Hide Password

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members:

Non-members: ADD TO CART

Keywords/Phrases

Search In:

Publication Years