The drawbacks of traditional multispectral imaging systems are their slow scanning speed and requirement for extremely accurate optical alignment. A bayer mosaic pixel type image sensor was manufactured by monolithically combining an infrared multi-band plasmonic microfilter with an InAs/GaSb type-II superlattice (T2SL) photodetector for each mosaic pixel. The quasi-three-dimensional (quasi-3D) plasmonic nanostructures as plasmonic microfilter had a period of 1.2 to 2.6 μm with 0.2 μm steps and were fabricated using nanoimprint lithography. The quasi-3D plasmon nanostructure has characteristics such as high optical transmission, wavelength selectivity, and wide incidence angle independence due to the effects of propagating and localized surface plasmon resonance of structure. Our research results suggest that it will be used as a core device in various fields by converging with IoT and big data technology because it does not require a separate optical system and can implement information for each infrared spectrum in real time.
This conference presentation was prepared for the Plasmonics: Design, Materials, Fabrication, Characterization, and Applications XX conference at SPIE Optics + Photonics 2022.
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