Mr. Haram Ko Profile

Haram Ko

at SAMSUNG Electronics Co Ltd

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Author

Publications (2)

Proceedings Article | 10 April 2024 Presentation + Paper

Advanced wafer engineering for minimizing overlay: tailoring and reducing wafer stress and distortion

Jong-Gu Lee, Hyeon-Jin Kim, JinMan Kim, HongJu Kim, Seok Heo, HaRam Ko, SungBin Jeon, YoungHa Kim, Jinhong Park, Hyunjae Kang, Jeong-Gil Kim

Proceedings Volume 12954, 129540D (2024) https://doi.org/10.1117/12.3010045

KEYWORDS: Semiconducting wafers, Wafer bonding, Distortion, Overlay metrology, Matrices, Deformation, Engineering, Crystals, Chemical mechanical planarization, Silicon

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Proceedings Article | 28 April 2023 Presentation + Paper

Chemical approach to make the most of EUVL: stochastic effect mitigation with developer and rinse

Hyungju Ryu, Dokyeong Kwon, Jiho Song, Wongi Park, Jinseong Gwak, Haram Ko, Jiyoung Lee, Jinpyoung Kim, Kyungseok Ryu, Sungjo Hwang, Taemin Jeong, Heeyoung Go, Yigwon Kim, Kyoungyong Cho, Sangjin Kim, Changmin Park

Proceedings Volume 12494, 1249404 (2023) https://doi.org/10.1117/12.2656415

KEYWORDS: Extreme ultraviolet, Stochastic processes, Extreme ultraviolet lithography, Lithography, Optical lithography, Photoresist processing, EUV optics, Chemical composition, Semiconductors

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