Dr. Li He Profile

Dr. Li He

at Shanghai Institute of Technical Physics CAS

SPIE Involvement:

Author | Editor

Publications (59)

Proceedings Article | 6 November 2023 Paper

Design and fabrication of HgCdTe linear avalanche devices with low gain normalized dark current density

Hao Xie, Huijun Guo, Chuan Shen, Liao Yang, Lu Chen, Li He

Proceedings Volume 12921, 1292108 (2023) https://doi.org/10.1117/12.2687407

KEYWORDS: Mercury cadmium telluride, Dark current, Signal to noise ratio, Avalanche photodetectors, Passivation, Fabrication, Etching, Design and modelling, Mid-IR

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Proceedings Article | 31 January 2023 Paper

Research on high gain-bandwidth product mid-wavelength infrared HgCdTe avalanche photodiodes

Hao Xie, Huijun Guo, Liqi Zhu, Liao Yang, Chuan Shen, Baile Chen, Lu Chen, Li He

Proceedings Volume 12505, 125050R (2023) https://doi.org/10.1117/12.2665553

KEYWORDS: Mercury cadmium telluride, Photocurrent, Mid-IR, Infrared radiation, Avalanche photodiodes, Absorption, Electric fields, Avalanche photodetectors, Infrared photography, Infrared imaging

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Proceedings Article | 31 January 2023 Paper

Developments and characterization of HgCdTe e-APDs at SITP

Huijun Guo, Liao Yang, Chuan Shen, Hao Xie, Dan Yang, Liqi Zhu, Quanzhi Sun, Chun Lin, Lu Chen, Ruijun Ding, Li He

Proceedings Volume 12505, 125050C (2023) https://doi.org/10.1117/12.2665280

KEYWORDS: Avalanche photodetectors, Mercury cadmium telluride, Dark current, Staring arrays, Medium wave, Doping, Temperature metrology, Mercury, Cadmium, Ionization

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Proceedings Article | 31 January 2023 Paper

In-situ ellipsometric study on composition-dependent short-wave HgCdTe in the process of molecular beam epitaxy growth

Liao Yang, Chuan Shen, Lu Chen, Li He

Proceedings Volume 12505, 125050O (2023) https://doi.org/10.1117/12.2664815

KEYWORDS: Mercury cadmium telluride, FT-IR spectroscopy, Epitaxy, Optical properties, Surface roughness, Sensors, Molecular beam epitaxy

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Proceedings Article | 31 January 2023 Paper

Characterization of gain and excess noise for mid-wavelength infrared HgCdTe electron avalanche photodiodes

Dan Yang, Huijun Guo, Liao Yang, Lu Chen, Chun Lin, Ruijun Ding, Li He

Proceedings Volume 12505, 125050E (2023) https://doi.org/10.1117/12.2665331

KEYWORDS: Mercury cadmium telluride, Signal to noise ratio, Staring arrays, Mid-IR, Avalanche photodetectors, Ionization, Avalanche photodiodes

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Proceedings Article | 2 December 2020 Paper

Dark current mechanism of medium wave HgCdTe avalanche photodiode

Liao Yang, Lu Chen, Huijun Guo, Dan Yang, Chuan Shen, Honglei Chen, Chun Lin, Ruijun Ding, Li He

Proceedings Volume 11717, 1171737 (2020) https://doi.org/10.1117/12.2587565

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Proceedings Article | 2 December 2020 Paper

The latest developments of HgCdTe e-APDs at SITP

Huijun Guo, Lu Chen, Liao Yang, Dan Yang, Chuan Shen, Quanzhi Sun, Honglei Chen, Chun Lin, Ruijun Ding, Li He

Proceedings Volume 11717, 1171736 (2020) https://doi.org/10.1117/12.2587556

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Proceedings Article | 26 February 2020 Presentation + Paper

Mid-infrared interband cascade light-emitting diodes with InAs/GaAsSb superlattices on InAs substrates

Qi Lu, Yi Zhou, Jianxin Chen, Li He, Anthony Krier

Proceedings Volume 11284, 1128415 (2020) https://doi.org/10.1117/12.2544811

KEYWORDS: Light emitting diodes, Mid-IR, Indium arsenide, Superlattices, Quantum wells, Arsenic, Molecular beam epitaxy

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Proceedings Article | 31 January 2020 Presentation + Paper

N2-cooled THz quartz-enhanced photoacoustic sensor operating in pulsed mode for hydrogen sulfide detection in the part-per-billion concentration range

Andrea Zifarelli, Angelo Sampaolo, Pietro Patimisco, Marilena Giglio, Chenren Yu, Huan Zhu, Haiqing Zhu, Gaolei Chang, Fangfang Wang, Jianxin Chen, Lianhe Li, A. Giles Davies, Edmund Linfield, Li He, Tingting Wei, Hongpeng Wu, Lei Dong, Gangyi Xu, Frank Tittel, Vincenzo Spagnolo

Proceedings Volume 11288, 112881W (2020) https://doi.org/10.1117/12.2545707

KEYWORDS: Terahertz radiation, Sensors, Absorption, Photoacoustic spectroscopy, Quantum cascade lasers, Liquids, Hydrogen, Pulsed laser operation, Mid-IR, Resonators, Sulfur

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Proceedings Article | 17 May 2019 Paper

The performance of mid-wave infrared HgCdTe e-avalanche photodiodes at SITP

Huijun Guo, Yushun Cheng, Lu Chen, Chun Lin, Hao Li, Honglei Chen, Ruijun Ding, Li He

Proceedings Volume 11170, 111702M (2019) https://doi.org/10.1117/12.2533729

KEYWORDS: Avalanche photodetectors, Mercury cadmium telluride, Mid-IR, Quantum efficiency, Signal to noise ratio, Electrons, Doping, Diodes, Ionization, Manufacturing

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Proceedings Article | 18 June 2018 Paper

A study on ALD ZnS passivation of HgCdTe IRFPAs detectors

A. L. Cui, Z. H. Ye, C. H. Sun, L. F. Liu, X. N. Hu, R. J. Ding, L. He

Proceedings Volume 10624, 106241Z (2018) https://doi.org/10.1117/12.2304578

KEYWORDS: Atomic layer deposition, Zinc, Mercury cadmium telluride, Sensors, Etching, Infrared detectors, Hydrogen, Scanning electron microscopy, Image processing, Infrared imaging

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Proceedings Article | 25 May 2017 Paper

A study on inductively coupled plasma etch rate of HgCdTe at cryogenic temperature

F. Liu, Y. Chen, Z. Ye, R. Ding, L. He

Proceedings Volume 10177, 101772H (2017) https://doi.org/10.1117/12.2262537

KEYWORDS: Zinc, Scanning electron microscopy, Surface roughness, Ions, Etching, Mercury cadmium telluride, Cryogenics, Plasma, Plasma etching, Assembly equipment, Infrared detectors, Infrared radiation, Staring arrays, Infrared sensors

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Proceedings Article | 16 May 2017 Open Access

The development of the infrared technology for meteorological satellites in Shanghai Institute of Technical Physics

W. Lu, L. Ding, L. He, X. Y. Li, J. X. Chen, X. S. Chen

Proceedings Volume 10177, 1017716 (2017) https://doi.org/10.1117/12.2266343

KEYWORDS: Infrared technology, Meteorological satellites, Infrared radiation, Infrared imaging, Infrared sensors, Infrared detectors, Imaging systems, Image resolution, Spectral resolution, Sensors

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SPIE Journal Paper | 4 May 2017

Electrical and optical performances of InGaAs/GaAsSb superlattice short-wavelength infrared detectors

Chuan Jin, Jianxin Chen, Qingqing Xu, ChengZhang Yu, Li He

OE, Vol. 56, Issue 05, 057102, (May 2017) https://doi.org/10.1117/12.10.1117/1.OE.56.5.057102

KEYWORDS: Quantum efficiency, Absorption, Superlattices, Laser sintering, Diffusion, Temperature metrology, Infrared detectors, Stereolithography, Arsenic, Short wave infrared radiation

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Proceedings Article | 28 April 2017 Presentation + Paper

Large format high SNR SWIR HgCdTe/Si FPA with multiple-choice gain for hyperspectral detection

Xiaoning Hu, Aibo Huang, Qingjun Liao, Lu Chen, Xin Chen, Hua Fan, Honglei Chen, Ruijun Ding, Li He, Dexin Sun, Yinnian Liu

Proceedings Volume 10213, 102130E (2017) https://doi.org/10.1117/12.2262912

KEYWORDS: Signal to noise ratio, Staring arrays, Short wave infrared radiation, Mercury cadmium telluride, Silicon, Readout integrated circuits, Interference (communication), Diodes, Spectral resolution, Infrared detectors, Sensors, Hyperspectral imaging, Imaging systems, Quantum efficiency

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Proceedings Article | 1 November 2016 Paper

Optimization of plasma etching of SiO2 as hard mask for HgCdTe dry etching

Yiyu Chen, Zhenhua Ye, Changhong Sun, Shan Zhang, Wen Xin, Xiaoning Hu, Ruijun Ding, Li He

Proceedings Volume 10157, 101573L (2016) https://doi.org/10.1117/12.2247502

KEYWORDS: Etching, Silica, Mercury cadmium telluride, Plasma etching, Dry etching

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Proceedings Article | 1 November 2016 Paper

Studies on different passivation on InAs/GaSb type-II superlattice photodetectors

Yurong Cui, Jianxin Chen, Zhicheng Xu, Jiajia Xu, Yi Zhou, Li He

Proceedings Volume 10157, 101573K (2016) https://doi.org/10.1117/12.2247485

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Proceedings Article | 20 May 2016 Paper

High operation temperature mid-wavelength interband cascade infrared photodetectors grown on InAs substrate

Yi Zhou, Jianxin Chen, Zhicheng Xu, Li He

Proceedings Volume 9819, 98191J (2016) https://doi.org/10.1117/12.2225131

KEYWORDS: Infrared radiation, Superlattices, Sensors, Indium arsenide, Infrared photography, Photodetectors, Infrared imaging, Quantum efficiency, Mid-IR, Electrons

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Proceedings Article | 20 May 2016 Paper

Inductively coupled plasma etching of HgCdTe IRFPAs detectors at cryogenic temperature

Y. Y. Chen, Z. H. Ye, C. H. Sun, S. Zhang, X. N. Hu, R. J. Ding, L. He

Proceedings Volume 9819, 981922 (2016) https://doi.org/10.1117/12.2222825

KEYWORDS: Etching, Mercury cadmium telluride, Cryogenics, Mercury, Plasma etching, Plasma, Reactive ion etching, Diffusion, Scanning electron microscopy, Argon

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Proceedings Article | 20 May 2016 Paper

Recent progress on dark current characterization of very long-wavelength HgCdTe infrared photodetectors and HgCdTe APDs in SITP

Weida Hu, Jiale He, Weicheng Qiu, Zhenhua Ye, Lu Chen, Chun Lin, Li He, Xiaoshuang Chen, Wei Lu

Proceedings Volume 9819, 981921 (2016) https://doi.org/10.1117/12.2222161

KEYWORDS: Mercury cadmium telluride, Long wavelength infrared, Infrared radiation, Infrared photography, Photodetectors, Infrared detectors, Photodiodes, Avalanche photodetectors, Doping, Lutetium

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Proceedings Article | 13 February 2016 Paper

InAs-based type-II superlattice long wavelength photodetectors

Fangfang Wang, Jianxin Chen, Zhicheng Xu, Yi Zhou, Li He

Proceedings Volume 9755, 975519 (2016) https://doi.org/10.1117/12.2209424

KEYWORDS: Superlattices, Indium arsenide, Gallium antimonide, Imaging spectroscopy, Photodetectors, Sensors, Quantum cryptography, Long wavelength infrared, Molecular beam epitaxy, Photodiodes, Infrared radiation, Diffusion, Temperature metrology

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Proceedings Article | 13 May 2015 Paper

Studies on abrupt and gradual band gap hole barriers in InAs/GaSb superlattice long wavelength photodetectors

Yi Zhou, Jianxin Chen, Fangfang Wang, Zhicheng Xu, Zhizhong Bai, Chuan Jin, Li He

Proceedings Volume 9481, 94810V (2015) https://doi.org/10.1117/12.2179742

KEYWORDS: Sensors, Gallium antimonide, Quantum efficiency, Superlattices, Stereolithography, Photodetectors, Structural design, Infrared technology, Absorption, Aluminum

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Proceedings Article | 13 April 2015 Paper

High performance InAs/GaSb superlattice long wavelength photodetectors based on barrier enhanced structures

Yi Zhou, Jianxin Chen, Fangfang Wang, Zhicheng Xu, Zhizhong Bai, Chuan Jin, Li He

Proceedings Volume 9522, 952223 (2015) https://doi.org/10.1117/12.2180425

KEYWORDS: Sensors, Gallium antimonide, Absorption, Quantum efficiency, Stereolithography, Superlattices, Photodetectors, Diffusion, Aluminum, Infrared detectors

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Proceedings Article | 20 November 2014 Paper

Molecular beam epitaxy growth of high quality InAs/GaSb type-II superlattices for long wavelength infrared detection

Fangfang Wang, Jianxin Chen, Zhicheng Xu, Yi Zhou, Qingqing Xu, Li He

Proceedings Volume 9300, 930008 (2014) https://doi.org/10.1117/12.2068276

KEYWORDS: Long wavelength infrared, Superlattices, Gallium antimonide, Stereolithography, Photodiodes, X-ray diffraction, Atomic force microscopy, Molecular beam epitaxy, Sensors, Infrared detectors

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Proceedings Article | 24 June 2014 Paper

Modeling of LWIR nBn HgCdTe photodetector

Z. Ye, Y. Chen, P. Zhang, C. Lin, X. Hu, R. Ding, L. He

Proceedings Volume 9070, 90701L (2014) https://doi.org/10.1117/12.2053288

KEYWORDS: Doping, Mercury cadmium telluride, Long wavelength infrared, Sensors, Cadmium, Photodetectors, Neodymium, Heterojunctions, Numerical analysis, Sensor performance

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Proceedings Article | 24 June 2014 Paper

Mercury cadmium telluride implanted junction profile measurement and depth control

Songmin Zhou, Chun Lin, Haibin Li, Yanfeng Wei, Zhenhua Ye, Ruijun Ding, Li He

Proceedings Volume 9070, 907031 (2014) https://doi.org/10.1117/12.2050100

KEYWORDS: Mercury cadmium telluride, Etching, Annealing, Ions, Chemical species, Resistance, Mercury, Ion implantation, 3D metrology, Infrared radiation

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Proceedings Article | 11 September 2013 Paper

Progress in the CdZnTe single crystal growth and substrates fabrication

Shi-wen Sun, Chang-he Zhou, Hui-xian Yu, Chao Xu, Feng-feng Sheng, Song-yin Sui, Jian-rong Yang, Li He

Proceedings Volume 8907, 890704 (2013) https://doi.org/10.1117/12.2035210

KEYWORDS: Crystals, Semiconducting wafers, Polishing, Surface finishing, Etching, Infrared imaging, Cadmium, Microscopes, Zinc, Crystallography

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Proceedings Article | 11 September 2013 Paper

Interface design and properties in InAs/GaSb type-II superlattices grown by molecular beam epitaxy

Zhicheng Xu, Jianxin Chen, Fangfang Wang, Yi Zhou, Qingqing Xu, Chuan Jin, Li He

Proceedings Volume 8907, 89073J (2013) https://doi.org/10.1117/12.2034009

KEYWORDS: Interfaces, Gallium antimonide, Laser sintering, Antimony, Camera shutters, Indium arsenide, Superlattices, Atomic force microscopy, Molecular beam epitaxy, Chemical species

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Proceedings Article | 15 October 2012 Paper

Dark current analysis of long wavelength InAs/GaSb superlattice infrared detector

Yi Zhou, Jianxin Chen, Qingqing Xu, Zhicheng Xu, Chuan Jin, Jiajia Xu, Li He

Proceedings Volume 8419, 841904 (2012) https://doi.org/10.1117/12.978226

KEYWORDS: Sensors, Superlattices, Gallium antimonide, Stereolithography, Infrared detectors, Diffusion, Indium arsenide, Infrared sensors, Silica, Medium wave

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Proceedings Article | 15 October 2012 Paper

N2 atmosphere annealing effect on HgCdTe electrical damage induced by ICP etching process

Jian Huang, Zhenhua Ye, Wenting Yin, Hanjie Hu, Chun Lin, Xiaoning Hu, Ruijun Ding, Li He

Proceedings Volume 8419, 84192I (2012) https://doi.org/10.1117/12.977400

KEYWORDS: Annealing, Etching, Mercury cadmium telluride, Mercury, Photodiodes, Sensors, Plasma etching, Array processing, Infrared imaging, Image sensors

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Proceedings Article | 15 October 2012 Paper

Molecular beam epitaxy of HgCdTe on (211)B CdZnTe

Weiqiang Wang, Lu Chen, Renjie Gu, Chuan Shen, Xiangliang Fu, Yuying Guo, Gao Wang, Feng Yang, Li He

Proceedings Volume 8419, 84190U (2012) https://doi.org/10.1117/12.977856

KEYWORDS: Mercury cadmium telluride, Crystals, Molecular beam epitaxy, Temperature metrology, FT-IR spectroscopy, Cadmium, Diffraction, Oxides, Optical microscopes, Oxidation

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Proceedings Article | 15 October 2012 Paper

The accurate measurement of background carrier concentration in short-period longwave InAs/GaSb superlattices on GaSb substrate

Zhicheng Xu, Jianxin Chen, Qingqing Xu, Yi Zhou, Chuan Jin, Fangfang Wang, Li He

Proceedings Volume 8419, 84190S (2012) https://doi.org/10.1117/12.970554

KEYWORDS: Gallium antimonide, Laser sintering, Etching, Superlattices, Long wavelength infrared, Indium arsenide, Wet etching, Stereolithography, Magnetism, Temperature metrology

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Proceedings Article | 31 May 2012 Paper

Studies on a novel mask technique with high selectivity and aspect-ratio patterns for HgCdTe trenches ICP etching

Z. Ye, W. Hu, Y. Li, J. Huang, W. Yin, C. Lin, X. Hu, R. Ding, X. Chen, W. Lu, L. He

Proceedings Volume 8353, 83532T (2012) https://doi.org/10.1117/12.918824

KEYWORDS: Mercury cadmium telluride, Etching, Silicon films, Silica, Plasma, Optical lithography, Scanning electron microscopy, Plasma etching, Standards development, Infrared radiation

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Proceedings Article | 8 September 2011 Paper

X-ray diffraction analysis of high quality InAs/GaSb Type II superlattices grown by MBE

Yi Zhou, Jianxin Chen, Qingqing Xu, Li He

Proceedings Volume 8193, 81932B (2011) https://doi.org/10.1117/12.900328

KEYWORDS: Interfaces, Stereolithography, Superlattices, Camera shutters, X-ray diffraction, Gallium antimonide, Satellites, Antimony, Indium arsenide, Absorption

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Proceedings Article | 8 September 2011 Paper

A novel junction profile measurement in HgCdTe epilayer by laser beam induced current

Haibin Li, Jingjie Xu, Songmin Zhou, Chun Lin, Li He

Proceedings Volume 8193, 81933I (2011) https://doi.org/10.1117/12.900799

KEYWORDS: Mercury cadmium telluride, Mercury, Arsenic, Medium wave, Chemical species, Infrared imaging, Infrared radiation, Photodiodes, Ion implantation, Semiconductors

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Proceedings Article | 7 May 2009 Paper

The development of HgCdTe infrared detector technology in China

W. Lu, L. He, X. Chen, L. Ding, S. Sun, J. Tang, J. Su

Proceedings Volume 7298, 72982Z (2009) https://doi.org/10.1117/12.819030

KEYWORDS: Mercury cadmium telluride, Infrared radiation, Infrared detectors, Sensors, Staring arrays, Silicon, Lutetium, Infrared spectroscopy, Infrared sensors, Spectroscopy

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Proceedings Article | 9 February 2009 Paper

A study of Hg1-xCdxTe surfaces processed using inductively coupled plasma with CH4/H2/N2/Ar mixture

Wenhong Zhou, Zhenhua Ye, Xiaoning Hu, Ruijun Ding, Li He

Proceedings Volume 7158, 71581B (2009) https://doi.org/10.1117/12.807068

KEYWORDS: Plasma, Etching, Mercury cadmium telluride, Plasma etching, Dry etching, Atomic force microscopy, Scanning probe microscopy, Reactive ion etching, Chemical analysis, Argon

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Proceedings Article | 17 January 2008 Paper

Surface defects induced by impurities in MBE-grown HgCdTe

Xiangliang Fu, Weiqiang Wang, Qingzhu Wei, Jun Wu, Lu Chen, Yan Wu, Li He

Proceedings Volume 6835, 68351U (2008) https://doi.org/10.1117/12.757156

KEYWORDS: Mercury cadmium telluride, Mercury, Photomicroscopy, Scanning electron microscopy, Tellurium, Microscopy, Infrared radiation, Infrared imaging, Staring arrays, Crystals

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Proceedings Article | 8 January 2008 Paper

Characterization of multilayered HgCdTe for MW/LW two-color application

Qingzhu Wei, Wenhong Zhou, Weiqiang Wang, Xiangliang Fu, Meifang Yu, Lu Chen, Yan Wu, Li He

Proceedings Volume 6835, 68351T (2008) https://doi.org/10.1117/12.757145

KEYWORDS: Mercury cadmium telluride, Sensors, Medium wave, Doping, Indium, Infrared radiation, Interfaces, Scanning electron microscopy, Infrared detectors, Multilayers

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Proceedings Article | 8 January 2008 Paper

Performance and reliability characteristic of Stirling cryocoolers

X. Liu, Y. Wu, L. He

Proceedings Volume 6835, 68350B (2008) https://doi.org/10.1117/12.756136

KEYWORDS: Cryocoolers, Reliability, Contamination, Failure analysis, Helium, Finite element methods, Analytical research, Cryogenics, Infrared detectors, Infrared radiation

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Proceedings Article | 14 October 2005 Paper

Low energy inductively coupled plasma etching of HgCdTe

Xiaoning Hu, Zhenhua Ye, Ruijun Ding, Li He, Glenn Tan, Ligang Deng

Proceedings Volume 5964, 596408 (2005) https://doi.org/10.1117/12.625143

KEYWORDS: Etching, Mercury cadmium telluride, Plasma, Plasma etching, Argon, Anisotropic etching, Ions, Electrodes, Dry etching, Silica

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