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Dr. Heikki Holmberg
at Okmetic Oyj
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Publications (1)
Proceedings Article | 27 February 2019 Presentation + Paper
Si photonics using micron-size waveguides
Timo Aalto, Matteo Cherchi, Mikko Harjanne, Fei Sun, Tapani Vehmas, Srivathsa Bhat, Markku Kapulainen, Ari Hokkanen, Lauri Lehtimäki, Heikki Holmberg, Atte Haapalinna
Proceedings Volume 10914, 109140B (2019) https://doi.org/10.1117/12.2516289
KEYWORDS: Waveguides, Silicon, Polarization, Mirrors, Vertical cavity surface emitting lasers, Sensors, Modulators, Semiconducting wafers, Silicon photonics, Germanium
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