Design a best light-weighting collimator to conform to the requirements of opto-mechanical design. Good surface accuracy is our aim, based on a less mass. The ratio of diameter to thickness, the type, size and thickness of pocket, the thickness of the mirror, the support size and position, the thickness of the wall and so on is concerned. Besides, comparing two kinds material is also discussed. In addition, we consider the situation that the orientation vary in support plane. Use the orthogonal table to analyze these elements, and find the better methods. According to the analysis in ANSYS, the collimator mass can reduce to 103 kg, below 159 kg; the ratio of light-weight can reach 70%; the peak-valley value is below 100 nm, that meets the request of below 200 nm.
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