Mr. Hung Yu Lin Profile

Hung Yu Lin

at Cadence Design Systems Inc

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Publications (8)

Proceedings Article | 10 April 2024 Poster + Paper

Using pattern analysis to improve process window qualification cycle time

Tsung-Wei Lin, Hung-Yu Lin, Meng-Shiun Chiang, Jung-Kuan Huang, Jason Sweis, Philippe Hurat, Chung-Chen Hsu, Chun-Sheng Wu, Chao-Yi Huang, Ya-Chieh Lai

Proceedings Volume 12954, 129541B (2024) https://doi.org/10.1117/12.3009892

KEYWORDS: Semiconducting wafers, Yield improvement, Tunable filters, Inspection, Image classification, Design, Scanning electron microscopy, Optical alignment, Wafer inspection, Defect inspection

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Proceedings Article | 10 April 2024 Presentation + Paper

Synthesizing ILT MB-SRAF using machine learning

Ferhat Turker Celepcikay, Chun-Cheng Liao, Teng-Yen Huang, Szu-Ping Chen, Chi Neng Lin, Alan Zhu, Hung Yu Lin

Proceedings Volume 12954, 129540H (2024) https://doi.org/10.1117/12.3010902

KEYWORDS: SRAF, Machine learning, Resolution enhancement technologies, Lithography, Image quality, Optical proximity correction

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Proceedings Article | 28 April 2023 Paper

Constructing layout hierarchy for high-efficiency OPC flow

Tsung-Wei Lin, Hung-Yu Lin, Mang-Shiun Chiang, Shi-Cheng Yeh, Jason Sweis, Philippe Hurat, Tung-Yu Wu, Chun-Sheng Wu, Chao-Yi Huang, Ya-Chieh Lai

Proceedings Volume 12495, 124951N (2023) https://doi.org/10.1117/12.2657649

KEYWORDS: Optical proximity correction, Design and modelling, Lithography, Manufacturing, Electronic design automation, Resolution enhancement technologies, Optics manufacturing, Image segmentation

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Proceedings Article | 26 May 2022 Poster + Paper

Using pattern analysis to improve wafer inspection flow

Hung-yu Lin, Ethan Wang, Jason Sweis, Philippe Hurat, Ya-Chieh Lai, Yu-Chin Pai, Ku Fang, Chin-Juan Li, Chia Wei Huang, Jun-Ming Chen, Yung-Feng Cheng

Proceedings Volume 12053, 120531T (2022) https://doi.org/10.1117/12.2613620

KEYWORDS: Inspection, Semiconducting wafers, Wafer inspection, Image classification, Yield improvement, Defect inspection, Data analysis, Software development, Defect detection, Tolerancing

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Proceedings Article | 26 May 2022 Poster + Paper

OPC optimization and hotspot detection using pattern diffing

Tsung-Wei Lin, Chun Yen Liu, Hung-Yu Lin, Mang-Shiun Chiang, Jason Sweis, Philippe Hurat, Chun Yen Liao, Chun-Sheng Wu, Chao-Yi Huang, Ya-Chieh Lai

Proceedings Volume 12052, 120521E (2022) https://doi.org/10.1117/12.2612476

KEYWORDS: Optical proximity correction, Image classification, Databases, Transistors, Semiconductor manufacturing, Reliability, Profiling, Manufacturing, Library classification systems, Integrated circuits

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Proceedings Article | 23 March 2020 Paper

Early detection of Cu pooling with advanced CMP modeling

Single Hsu, Ethan Wang, Eason Lin, Tamba Gbondo-Tugbawa, Aaron Gower-Hall, Brian Lee, Jansen Chee, Ya-Chieh Lai

Proceedings Volume 11328, 1132816 (2020) https://doi.org/10.1117/12.2551253

KEYWORDS: Chemical mechanical planarization, Copper, Metals, Systems modeling, Data modeling, Oxides, Calibration, Performance modeling, Back end of line, Process modeling

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Proceedings Article | 20 March 2018 Paper

A portable pattern-based design technology co-optimization flow to reduce optical proximity correction run-time

Yi-Chieh Chen, Tsung-Han Li, Hung-Yu Lin, Kao-Tun Chen, Chun-Sheng Wu, Ya-Chieh Lai, Philippe Hurat

Proceedings Volume 10588, 1058810 (2018) https://doi.org/10.1117/12.2297077

KEYWORDS: Optical proximity correction, Integrated circuit design, Optics manufacturing, Mathematical modeling, Design for manufacturability, Electronics, Integrated circuits, Integrated optics, Semiconductor manufacturing

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Proceedings Article | 28 March 2017 Paper

A fast process development flow by applying design technology co-optimization

Yi-Chieh Chen, Shin-Shing Yeh, Tsong-Hua Ou, Hung-Yu Lin, Yung-Ching Mai, Lawrence Lin, Jun-Cheng Lai, Ya Chieh Lai, Wei Xu, Philippe Hurat

Proceedings Volume 10148, 1014815 (2017) https://doi.org/10.1117/12.2257973

KEYWORDS: Lithography, Optical proximity correction, Machine learning, Databases, Integrated circuit design, Manufacturing, Metals, Semiconductor manufacturing, Transistors, Raster graphics

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Showing 5 of 8 publications

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