Ms. Hyun-Ju Lee Profile

Hyun-Ju Lee

at Hanyang Univ

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 4 October 2016 Paper

Hyun-Ju Lee, Eun-Sang Park, In-Seon Kim, Hye-Keun Oh

Proceedings Volume 9985, 99851K (2016) https://doi.org/10.1117/12.2242174

KEYWORDS: Pellicles, Extreme ultraviolet, Finite element methods, Scanners, Silicon, Protactinium, Graphene, Zirconium, Silicon carbide, Molybdenum

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