Dr. James M. Blackwell
at Intel Corp
SPIE Involvement:
Author
Publications (25)

Proceedings Article | 10 April 2024 Presentation
Michael Eller, Brandon Holybee, Dmitriy Verkhoturov, Michael Shaw, Stanislav Verkhoturov, Blake Bluestein, Morgan Hazelbaker, Carly Rogan, Serge Della-Negra, James Blackwell, Emile Schweikert
Proceedings Volume 12955, 1295509 (2024) https://doi.org/10.1117/12.3011750
KEYWORDS: Silicon, Ions, Extreme ultraviolet, Chemical analysis, Ultraviolet radiation, Spectroscopy, Semiconductors, Photoacid generators, Photo decomposable quencher, Mass spectrometry

SPIE Journal Paper | 8 March 2024
Oleg Kostko, Terry McAfee, Jonathan Ma, James Blackwell, Patrick Naulleau
JM3, Vol. 23, Issue 01, 014602, (March 2024) https://doi.org/10.1117/12.10.1117/1.JMM.23.1.014602
KEYWORDS: Electrons, Extreme ultraviolet, Polymers, Photons, Extreme ultraviolet lithography, Absorption, Signal attenuation, Photoemission spectroscopy, Film thickness, Signal intensity

SPIE Journal Paper | 28 November 2022
Michael Eller, Jander Cruz, Stanislav Verkhoturov, Michael Robinson, James Blackwell, Emile Schweikert
JM3, Vol. 21, Issue 04, 044002, (November 2022) https://doi.org/10.1117/12.10.1117/1.JMM.21.4.044002
KEYWORDS: Photoacid generators, Ions, Statistical analysis, Extreme ultraviolet, Stochastic processes, Correlation coefficients, Molecules, Mass spectrometry, Photoresist materials, Chemical analysis

Proceedings Article | 11 November 2022 Presentation
Michael Eller, Jander Cruz, Stanislav Verkhoturov, Michael Robinson, James Blackwell, Emile Schweikert
Proceedings Volume PC12292, PC122920J (2022) https://doi.org/10.1117/12.2641539
KEYWORDS: Extreme ultraviolet, Ions, Quenching (fluorescence), Stochastic processes, Spectroscopy, Semiconductors, Polymers, Mass spectrometry, Data analysis, Data acquisition

SPIE Journal Paper | 7 November 2022
Jander Cruz, Stanislav Verkhoturov, Dmitriy Verkhoturov, Michael Robinson, James Blackwell, Michael Eller, Emile Schweikert
JM3, Vol. 21, Issue 04, 044001, (November 2022) https://doi.org/10.1117/12.10.1117/1.JMM.21.4.044001
KEYWORDS: Ions, Extreme ultraviolet, Polymers, Photoresist processing, Mass spectrometry, Stochastic processes, Diffusion, Molecular spectroscopy, Quenching (fluorescence), Gold

Showing 5 of 25 publications
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