Dr. Jasmeet S. Chawla Profile

Dr. Jasmeet S. Chawla

at Intel Corp

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Publications (3)

SPIE Journal Paper | 6 January 2016

Evaluation of the effect of data quality on the profile uncertainty of critical dimension small angle x-ray scattering

Daniel Sunday, Scott List, Jasmeet Chawla, R. Joseph Kline

JM3, Vol. 15, Issue 01, 014001, (January 2016) https://doi.org/10.1117/12.10.1117/1.JMM.15.1.014001

KEYWORDS: Scattering, Synchrotrons, Sensors, Time metrology, X-rays, Data modeling, Signal to noise ratio, Laser scattering, Statistical modeling, Metrology

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Proceedings Article | 14 April 2014 Paper

10nm three-dimensional CD-SEM metrology

András Vladár, John Villarrubia, Jasmeet Chawla, Bin Ming, Joseph Kline, Scott List, Michael Postek

Proceedings Volume 9050, 90500A (2014) https://doi.org/10.1117/12.2045977

KEYWORDS: Scanning electron microscopy, 3D metrology, 3D modeling, Transmission electron microscopy, Model-based design, Electron beams, Metrology, Monte Carlo methods, 3D image processing, Process control

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Proceedings Article | 28 March 2014 Paper

Patterning challenges in the fabrication of 12 nm half-pitch dual damascene copper ultra low-k interconnects

J. Chawla, K. Singh, A. Myers, D. Michalak, R. Schenker, C. Jezewski, B. Krist, F. Gstrein, T. Indukuri, H. Yoo

Proceedings Volume 9054, 905404 (2014) https://doi.org/10.1117/12.2048599

KEYWORDS: Optical lithography, Dielectrics, Plasma, Metals, Critical dimension metrology, Etching, Copper, Lithography, Chemistry, Process control

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