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Jayant Kumar Lodha
at imec
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Publications (1)
Proceedings Article | 10 April 2024 Presentation
Area-selective deposition and bottom-up approaches: an overview of applications in IC manufacturing
Silvia Armini, Mikhail Krishtab, Mattia Pasquali, Jayant Kumar Lodha, Annelies Delabie, Marleen van der Veen, Farid Sebaai
Proceedings Volume PC12958, (2024) https://doi.org/10.1117/12.3012745
KEYWORDS: Manufacturing, Optical lithography, Etching, Atomic layer deposition, Wet etching, Nanostructures, Nanoelectronics, Fabrication, Atomic layer etching
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