Steps are described for fabricating, preparing, and assembling pigtailed optical mode converters being developed for low loss coupling of optical fibers to high index contrast waveguide devices and arrays. The mode converters comprise adiabatic waveguide tapers fabricated from silicon-on-insulator (SOI) wafers, utilizing the silicon device layer as a waveguide core and the buried oxide as the underlying clad. Polished facets comprise the input and output ends of the tapers. The mode shape at the input typically matches that of an SMF-28 fiber, while the output ends can be sized to match various waveguide device mode shapes, typically ranging from 1 to 5 microns with aspect ratios as high as 5:1. Semiconductor planar processing techniques are employed to form the tapers upon commercial SOI wafers. An additional oxide layer is deposited upon the tapers to provide a symmetric clad around the silicon. Once fabricated, the wafers are diced into chips containing rows of tapers. The input and output facets are then lapped and polished, using a precision end point process, after which an anti reflective (AR) coating is applied. Following AR coating the chips are aligned and bonded to either single fibers or V-groove fiber arrays, creating the final pigtailed mode converter device. The insertion loss for completed mode converters ranges from 0.5 to 1 dB depending upon output facet size and asymmetry.
A method for fabrication of novel thin-filrn continuous dynode electron
multipliers is described. We have shown the feasibility of crucial
manufacturing steps, including anisotropic dry etching of substrates
into photolithographically-defined arrays of high-aspect-ratio channels,
and the formation of thin-film continuous dynodes by chemical vapor
deposition. We discuss potential performance and design advantages of
this advanced technology microchannel plate (AT-MCP) over the conven
tional reduced lead silicate glass inicrochannel plate (RLSG-'MCP) and
implications for new applications.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.