Block copolymer directed self-assembly (DSA) is a promising technique to print Contact Holes/Vias with polymer blend materials or block copolymers. Polymer blend material is to mix block copolymer and homopolymer. In this paper, the materials we use are polymer blend materials with polystyrene-b-polycarbonate (PS-b-PC) block copolymer and corresponding homopolymer polystyrene. The advantage of polymers is that they do not require complex molecular design and can form cylindrical structures as long as the proportions are right. The polymer can be mixed and used immediately without waiting time. Based on the PS-b-PC which can form a stable lamellar structure, we achieve a controllable cylindrical structure by mixing the two materials and controlling the concentration. After multiple comparison experiments, the phase segregation results of PS-b-PC with PS ratio of 2:1 and 1.5:1 were better, with the diameter about 12.7nm and 14.1nm, and the pitch about 20nm and 22.7nm, respectively.
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