Dr. Jurjen Emmelkamp Profile

Dr. Jurjen Emmelkamp

at TNO

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 22 November 2023 Presentation

Cederik Meekes, Dagmar Wismeijer, Jurjen Emmelkamp, Henk Lensen

Proceedings Volume PC12750, PC1275005 (2023) https://doi.org/10.1117/12.2686732

KEYWORDS: Hydrogen, Plasma, Metals, Modeling, Diffusion, Grain boundaries, Extreme ultraviolet, Alloys, Wafer-level optics, Vacuum

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Keywords/Phrases