Ms. Kaori Umezawa Profile

Kaori Umezawa

at KIOXIA Corp

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 29 September 2019 Presentation + Paper

Mana Tanabe, Kosuke Takai, Kyo Otsubo, Kaori Umezawa, Minako Iinuma, Hideaki Sakurai, Shingo Kanamitsu

Proceedings Volume 11148, 111480N (2019) https://doi.org/10.1117/12.2536471

KEYWORDS: Particles, Photomasks, Nanoparticles, Liquids, Nanotechnology, Inspection, Lithography, Optical lithography

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Keywords/Phrases