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Kazuki Ota
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Publications (1)
Proceedings Article | 10 April 2024 Poster + Paper
A study on detection of wafer process changes using stand-alone wafer metrology tool
Wataru Yamaguchi, Shinichiro Hirai, Kazuya Kijima, Kazuki Ota, Seiya Miura, Isao Tanaka, Kazuhiro Segawa, Charlie Chen
Proceedings Volume 12955, 129552A (2024) https://doi.org/10.1117/12.3009951
KEYWORDS: Semiconducting wafers, Overlay metrology, Inspection, Signal processing, Optical alignment, Distortion, Signal detection, Film thickness, Metrology, Signal intensity
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