This paper presents our development of a compact and magnetic-aerostatic vibration isolation platform for small
equipments such as AFM-system, which combines the electromagnetic and aerostatic principles to create a semiactive
damping effect. For the aerostatic principle, the concept of cap-shaped bearing form is applied to combine radial and
axial bearings inside a cap-shaped air film to enhance the bearing capacity. The axial aerostatic bearing provides the
main supporting force for the vibration isolation platform, and the radial aerostatic bearing creates frictionless and
accurate guide for the platform. The electromagnetic coil is used to generate attractive force to counterbalance the axial
aerostatic bearing force. Through this force counterbalance, not only the axial bearing stiffness can be minimized but
also the axial position of the platform can be precisely controlled. In the axial positioning control, a hall element and a
magnet are used to realize a non-contact displacement measurement with less loading effect. Besides, the robust PID
control algorithm is chosen as the main core of the positioning control. For optimization and performance verification,
finite element analyses and experiments are carried out to comprehend its electromagnetic and aerostatic effects.
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