Kohei Imoto
Senior Engineer at Canon Inc
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 19 March 2018 Paper
Atsushi Kimura, Kohei Imoto, Chiaki Sato, Kiyohito Yamamoto, Hiroshi Inada, Mitsuru Hiura, Takehiko Iwanaga, Ali Aghili, Makoto Mizuno, Jin Choi, Chris Jones
Proceedings Volume 10584, 105840Q (2018) https://doi.org/10.1117/12.2299636
KEYWORDS: Photomasks, Particles, Semiconducting wafers, Nanoimprint lithography, Optical lithography, Mask cleaning, Lithography, Manufacturing equipment, Capillaries, Ultraviolet radiation

Proceedings Article | 16 October 2017 Paper
Kohei Imoto, Mitsuru Hiura, Hiroshi Morohoshi, Tatsuya Hayashi, Atsushi Kimura, Yoshio Suzaki, Jin Choi
Proceedings Volume 10451, 104511B (2017) https://doi.org/10.1117/12.2280440
KEYWORDS: Photomasks, Semiconducting wafers, Lithography, Overlay metrology, Nanoimprint lithography, Particles, Semiconductors, Distortion, Semiconductor manufacturing, Capillaries

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