Mr. Kouji Kimura Profile

Kouji Kimura

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 10 May 2005 Paper

Three-dimensional measurement by tilting and moving objective lens in CD-SEM(III)

K. Abe, Y. Tsuruga, S. Okada, T. Noma, H. Aoki, H. Fujii, H. Koike, A. Hamaguchi, Y. Yamazaki

Proceedings Volume 5752, (2005) https://doi.org/10.1117/12.600336

KEYWORDS: Objectives, Image resolution, Reconstruction algorithms, 3D image processing, Optical systems, Semiconductors, Scanning electron microscopy, 3D image reconstruction, Optical simulations, Image acquisition

Read Abstract +

Proceedings Article | 24 May 2004 Paper

Three-dimensional measurement by tilting and moving the objective lens in CD-SEM (II)

Kazuo Abe, Kouji Kimura, Yasuko Tsuruga, Shin-ichi Okada, Hitoshi Suzuki, Nobuo Kochi, Hirotami Koike, Akira Hamaguchi, Yuichiro Yamazaki

Proceedings Volume 5375, (2004) https://doi.org/10.1117/12.536134

KEYWORDS: Objectives, 3D metrology, Image resolution, 3D image processing, Semiconductors, Reconstruction algorithms, 3D image reconstruction, Magnetism, Electron beams, Optical simulations

Read Abstract +

Proceedings Article | 2 June 2003 Paper

Three-dimensional measurement by tilting and moving objective lens in CD-SEM

Kouji Kimura, Kazuo Abe, Yasuko Tsuruga, Hitoshi Suzuki, Nobuo Kochi, Hirotami Koike, Yuuichiro Yamazaki

Proceedings Volume 5038, (2003) https://doi.org/10.1117/12.483687

KEYWORDS: Objectives, Reconstruction algorithms, Electron beams, 3D image processing, 3D metrology, Algorithm development, Image resolution, Semiconducting wafers, 3D image reconstruction, Semiconductors

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years