Prof. Laurent Karsenti Profile

Prof. Laurent Karsenti

Project Manager DFM at Magma Design Automation Inc

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Author

Publications (3)

Proceedings Article | 3 April 2010 Paper

Tracking of design related defects hidden by random defectivity in production environment

J. Le Denmat, V. Charbois, L. Tetar, M. Luche, G. Kerrien, F. Robert, E. Yesilada, F. Foussadier, L. Couturier, L. Karsenti, M. Geshel

Proceedings Volume 7641, 76410Y (2010) https://doi.org/10.1117/12.848763

KEYWORDS: Semiconducting wafers, Inspection, Wafer inspection, Optical alignment, Defect inspection, Finite element methods, Statistical analysis, Optical proximity correction, Etching, Control systems

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Proceedings Article | 24 March 2009 Paper

Efficient use of design-based binning methodology in a DRAM fab

Laurent Karsenti, Arno Wehner, Andreas Fischer, Uwe Seifert, Jens Goeckeritz, Mark Geshel, Dieter Gscheidlen, Avishai Bartov

Proceedings Volume 7272, 727239 (2009) https://doi.org/10.1117/12.814095

KEYWORDS: Inspection, Semiconducting wafers, Finite element methods, SRAF, Defect inspection, Optical proximity correction, Design for manufacturing, Metrology, Lithography, Modulation

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Proceedings Article | 4 March 2008 Paper

Design based binning for litho qualification and process window qualification

Andreas Fischer, Uwe Seifert, Arno Wehner, Laurent Karsenti, Mark Geshel, Amiad Conley, Dieter Gscheidlen, Avishai Bartov

Proceedings Volume 6925, 69251S (2008) https://doi.org/10.1117/12.775713

KEYWORDS: Semiconducting wafers, Computer aided design, Scanning electron microscopy, Metrology, Defect inspection, Optical transfer functions, Photomasks, Optical proximity correction, Finite element methods, Lithography

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