Prof. Lei Shao Profile

Prof. Lei Shao

at Shanghai Jiao Tong Univ

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Publications (1)

Proceedings Article | 27 November 2023 Paper

Imaging of MEMS morphology and deformation based on digital holography

Shuaibing Chen, Jiahao Wu, Zhenkai Chen, Lei Shao, Wenjing Zhou

Proceedings Volume 12768, 127680H (2023) https://doi.org/10.1117/12.2686805

KEYWORDS: Microelectromechanical systems, Deformation, Digital holography, Inspection, Vibrometry, Spherical lenses, Motion analysis, Error analysis, Reflection, Optical surfaces

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