Extreme ultraviolet (EUV) lithography sources generate energetic tin ions. Accurate modeling of ion transport relies on knowledge of elastic scattering cross-section of tin ions against molecular hydrogen. This work uses available theoretical knowledge of elastic scattering found in literature, quantum chemistry modeling of the interaction potential between tin and hydrogen, and experimental scattering measurements of a tin ion beam to calculate the cross-section values. Furthermore, semi-classical collision calculations were used to calculate collision induced dissociation cross sections of tin ions and molecular hydrogen.
The laser produced plasma of Extreme Ultraviolet (EUV) sources create energetic tin ions. Hydrogen buffer gas is used to slow down the ions through scattering. The scattering cross sections are not well known and are key to modeling the device. Beam attenuation experiments of tin ions in molecular hydrogen gas are underway in order to determine its effective cross section and intermolecular potential. This can be used to model tin ion transport inside of EUV source tools. Measurements are still underway and the exact values of the interatomic potential will be the topic of future publications. Once the potential is well characterized, it will be added to the open-source binary-collision-approximation code RustBCA.
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