Lixiang Wu
at Univ of Science and Technology of China
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 28 October 2016 Paper
Siwei Zeng, Lixiang Wu, Keqiang Qiu, Zhengkun Liu, Yilin Hong, Shaojun Fu
Proceedings Volume 9683, 96830L (2016) https://doi.org/10.1117/12.2242280
KEYWORDS: Etching, Ion beams, Photoresist materials, Diffraction gratings, Monte Carlo methods, Sputter deposition, Lithium, Quartz, Ions, Chemical species

Proceedings Article | 13 March 2015 Paper
Lixiang Wu, Keqiang Qiu, Xiaolong Jiang, Yanchang Zheng, Xiangdong Xu, Yilin Hong, Shaojun Fu
Proceedings Volume 9374, 937411 (2015) https://doi.org/10.1117/12.2077396
KEYWORDS: Etching, Ion beams, Raster graphics, Ions, Diffraction gratings, Optical components, Algorithm development, Vacuum ultraviolet, Synchrotron radiation, Synchrotron technology

Proceedings Article | 28 August 2014 Paper
Proceedings Volume 9170, 917018 (2014) https://doi.org/10.1117/12.2058669
KEYWORDS: Etching, Silicon, Anisotropic etching, Lithography, Fabrication, Semiconducting wafers, Potassium, Photoresist materials, Aluminum, Optical alignment

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