This paper presents the design and fabrication of a silicon island supported resonating beam-based micropressure sensor with piezoelectric excitation and detection. The sensor consists of a silicon frame with silicon islands supporting a silicon nitride (SIN) resonating beam placed diagonally on the island in a square diaphragm made of silicon. Aluminum nitride (AlN) thin films deposited at the extreme ends of the SIN beam is used for resonant actuation and sensing. Customized process steps are followed with seven masks to fabricate the sensor, which is first of its kind in the fabrication of microresonant pressure sensors with AlN as piezoelectric material for sensing and actuating the resonating beam. Basic mechanical and electrical characterization is carried out on the unit devices individually to identify the resonance characteristics of the sensor. The results obtained from numerical simulations and experimentation are in close agreement and in the same dimensional range. Closed loop electronics are also designed and tested to vibrate the resonating beam of the unit device at its resonant frequency under no pressure load conditions, which is found to be close to the measured resonance frequency from the mechanical characterization.
A new magnetic field intensity measurement method using resonance principle is proposed in this paper. The proposed magnetic field sensor consists of magneto rheological (MR) fluid placed between two collocated, piezo-bounded, metallic, circular disc mounted face to face in the z-axis. The resonant frequency of the disc is changed by the magnetic field dependent viscosity of the MR fluid. The key enabling concept in this work is stiffening the circular metal disc using the rheological effect of MR fluid i.e. resonant frequency varies with respect to magnetic field strength. The change in resonant frequency is measured using simple closed loop electronics connected between the two piezo crystals. The analytical model of the vibrating circular discs with MR fluid placed at the center is derived and the results are validated with experimentation. The proposed magnetic flux density measurement concept is novel and it is found to have better sensitivity and linearity.
This paper presents a simple closed loop circuit (oscillator) design for producing sustained, oscillations required to continuously vibrate the resonance based pressure sensor at its resonant frequency. For each variation in applied input pressure, the sensor’s resonant frequency varies and the circuit makes the sensor to vibrate at its new resonant frequency, thereby enabling the measurement of change in resonant frequency shift due to corresponding pressure. The resonant condition is achieved by automatic tuning of phase angle required to satisfy Barkhausen criteria. The proposed circuit is evaluated analytically and verified experimentally for different pressure sensors fabricated using various grades of Stainless Steel material.
KEYWORDS: Microresonators, Statistical analysis, Uncertainty analysis, Testing and analysis, Resonators, Tolerancing, Instrumentation control, Control systems, Instrumentation engineering, Monte Carlo methods
This paper presents an uncertainty analysis of micro electro mechanical systems using analytical methods and interval
analysis. Laterally driven polysilicon resonant micro structure is considered to illustrate the analysis.
In this paper, a Micro resonating sensor with split mass concept is designed and analyzed for differential quantity
measurement by extending the two mass concepts with one more drive mass. The model of the proposed resonator is
derived and represented in state space form. The performance for differential pressure sensing is analyzed using
MATLAB. The simulation results demonstrates that the first split mode frequency of third mass exhibiting high
resonating magnitude variation with the differential pressure, which is simulated by varying the stiffness of the drive
masses.
This paper presents the design of reaching law based discrete time sliding mode control for the SMA actuated cantilever
beam to suppress the vibration in the presence of external disturbance. A linear dynamic model of the SMA actuated
cantilever beam structure is experimentally established using online ARX RLS system identification approach. A digital
control system that consists of simulink modeling software and dSPACE 1104 controller board has been used for
identification. The VSC controller is designed starting with the switching surface design. The eigen values of the reduced
order system are located suitably so that it lies inside the unit circle and the system is stable. The performance of the
controller for vibration suppression and disturbance rejection was evaluated through simulation by exciting the structure
at resonance.
The problem of modeling and control of displacement, force excited single degree freedom structure and displacement excited two degree of freedom structure with ER fluid damper is presented. A Sliding Mode Controller (SMC) is designed and applied to control seismically excited vibrations in these structures. The performance of SMC is compared with Lyapunov's direct method based controller.
In this paper, the problem of modeling and output feedback control design for smart structural system using piezoelectric as sensor/actuator is addressed. The model for a smart cantilever beam is developed by Finite Element Method (FEM). State space models for a smart cantilever beam with single sensor/actuator for three different sensor/actuator locations are obtained. The fast output sampling feedback control is designed to control the first two vibration modes for each sensor/actuator location and its performance is evaluated.
A finite element formulation using first-order shear deformation theory is used for vibration control of plates with piezoelectric sensors/actuators. The geometric nonlinearity based on von Karman's assumptions and structural damping in the form of Rayleigh damping are introduced in the present work. The formulation presented here, in general, is applicable for laminated composite structure. The dynamic responses are obtained using Newmark method coupled with iteration technique. The results pertaining to plates are presented.
KEYWORDS: Sensors, Actuators, Control systems, Vibration control, Feedback control, Smart structures, Systems modeling, Finite element methods, Distributed computing, Computing systems
Active control has become important in structural systems as an efficient tool for vibration suppression. A cantilever beam has been chosen as a flexible structure. The entire structure (beam with sensors and actuators) is modeled by Finite Element Method (FEM) by using two different elements. A special beam element, which includes sensor and actuator dynamics has been developed. This finite element is used to model the regions where piezoelectrics are bonded and the rest of the structure is modeled with regular beam elements. Since much of the flexible energy is contained by the first few modes, controlled is designed to suppress only the first two modes. The state-space model of the system is obtained by appropriate method from the FEM model. The significant structural vibrations have been suppressed by using State Feedback and Optimal Output Feedback control laws. The optimal sensor/actuator location for controlling the first two modes has been done.
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