CONFERENCE PROCEEDINGS
Advanced Search
Melissa V. Collins
at Sandia National Labs
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 2 October 2001 Paper
Optimization of anodic bonding to MEMS with self-assembled monolayer (SAM) coatings
Melissa Collins, Lauren Rohwer, Andrew Oliver, Matthew Hankins, Deidre Hirschfeld
Proceedings Volume 4558, (2001) https://doi.org/10.1117/12.443007
KEYWORDS: Silicon, Semiconducting wafers, Glasses, Wafer bonding, Microelectromechanical systems, Packaging, Self-assembled monolayers, Contamination, Interfaces, Epoxies
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top