Dr. Michael Murphy Profile

Dr. Michael Murphy

at TEL Technology Ctr America LLC

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Author

Publications (3)

Proceedings Article | 10 April 2024 Presentation

Breaching high-NA EUV dimensions with 193i anti-spacer multipatterning

Michael Murphy, Jacob Dobson, Jodi Grzeskowiak, David Power, Charlotte Cutler, Andrew Weloth, David Conklin

Proceedings Volume 12957, 1295711 (2024) https://doi.org/10.1117/12.3010447

KEYWORDS: Extreme ultraviolet, Printing, Lithography, Optical lithography, Integrated circuits, Film thickness, Extreme ultraviolet lithography, Etching, Double patterning technology, Chemistry

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Proceedings Article | 9 April 2024 Presentation + Paper

Sub-20nm tip-to-tip enabled by anti-spacer patterning

J. Grzeskowiak, M. Murphy, D. Power, S. Grzeskowiak, E. Liu, D. Conklin, A. deVilliers

Proceedings Volume 12957, 129570U (2024) https://doi.org/10.1117/12.3009982

KEYWORDS: Double patterning technology, Advanced patterning, Photoresist materials, Optical lithography, Etching, Extreme ultraviolet, Design, Extreme ultraviolet lithography, Lithography, Scanning electron microscopy, Printing, Semiconducting wafers

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Proceedings Article | 30 April 2023 Presentation

Process signature correction through film thickness modification of a spin-on glass film

Jodi Grzeskowiak, Michael Murphy, Daniel Fulford, David Conklin

Proceedings Volume 12498, 1249808 (2023) https://doi.org/10.1117/12.2657589

KEYWORDS: Glasses, Semiconducting wafers, Chemistry, Semiconductor manufacturing, Optical lithography, Metals, Laser systems engineering, Integrated circuits, Etching, Double patterning technology

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