Dr. Mohammad Saghayezhian Profile

Dr. Mohammad Saghayezhian

at Veeco

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Author

Publications (4)

Proceedings Article | 13 November 2024 Presentation

Low density diamond-like carbon for pellicle application

Mohammad Saghayezhian, JoJo Daof, Vincent Ip, Katrina Rook, Meng Lee, Marjorie Chee, Joshua Park

Proceedings Volume PC13215, PC132150G (2024) https://doi.org/10.1117/12.3034735

KEYWORDS: Carbon, Pellicles, Extreme ultraviolet, Mass attenuation coefficient, Hydrogen, Coating stress, Carbon nanotubes, Tunable filters, Thin films, Protective coatings

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Proceedings Article | 22 November 2023 Presentation

Influence of inhomogeneities on the reflectance and optical efficiency of MO/SI multilayers for EUV mask blanks

Antonio Checco, Katrina Rook, Mohammad Saghayezhian, Kenji Yamamoto, Meng Lee, Ashish Kulkarni

Proceedings Volume PC12751, PC127510D (2023) https://doi.org/10.1117/12.2687750

KEYWORDS: Reflectivity, Multilayers, Inhomogeneities, Extreme ultraviolet, EUV optics, Optical simulations, Imaging systems, Film thickness, Ion beams, Design and modelling

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Proceedings Article | 22 November 2023 Poster

The EUV optical constants of high and low density diamond-like carbon: mask blanks and pellicles

Mohammad Saghayezhian, Jojo Daof, Katrina Rook, Antonio Checco, Meng Lee, Marjorie Chee

Proceedings Volume PC12750, PC127500X (2023) https://doi.org/10.1117/12.2687690

KEYWORDS: Extreme ultraviolet, Carbon, Diamond, Coating stress, Thin films, Optical properties, Film thickness, Extreme ultraviolet lithography, Tunable filters, Reticles

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Proceedings Article | 16 September 2022 Paper

Diamond-like-carbon as a novel capping material for EUV mask blanks

Katrina Rook, JoJo Daof, Antonio Checco, Mohammad Saghayezhian, Kenji Yamamoto, Meng Lee, Marjorie Chee

Proceedings Volume 12325, 123250F (2022) https://doi.org/10.1117/12.2642182

KEYWORDS: Reflectivity, Extreme ultraviolet, Ruthenium, Multilayers, Carbon, Ion beams, Oxidation, X-ray optics, Silicon

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