We present a novel approach to create spinodal-like structures appropriately modulating the instability of the solid state dewetting: many materials, indeed, featuring anomalous suppression of density fluctuations over large length scales are emerging systems known as disordered hyperuniform. The underlying hidden order renders them appealing for several applications, as light management and topologically protected electronic states. These applications require scalable fabrication, which is hard to achieve with available top-down approaches. These spinodal materials are used by a hybrid top-down/bottom-up approach based on sol-gel dip-coating and nano-imprint lithography for the faithful reproduction of the disordered metasurfaces in metal oxides (SiO2 and TiO2).
Fabrication and scaling of disordered hyperuniform (dHU) materials remain hampered by the difficulties in controlling the spontaneous phenomena leading to this novel kind of exotic arrangement of objects. In this work, we demonstrate a hybrid top-down/bottom-up approach based on sol-gel dip-coating and nano-imprint lithography for the faithful reproduction of dHU metasurfaces in metal oxides (MOx). Nano- to micro-structures made of silica and titania can be directly printed over several cm2 on glass and on silicon substrates. Firstly, we describe the polymer mold fabrication starting from a hard master obtained via spontaneous solid-state dewetting. Then we address the effective dHU character of the master and of the replica and the role of the initial thickness of the sol-gel layer on the MOx replicas. Finally, these structures will be optimized towards their exploitation in many potential photonic applications like photonic devices (anti-reflection coatings, quantum emitters).
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